JPS63140061U - - Google Patents

Info

Publication number
JPS63140061U
JPS63140061U JP3332887U JP3332887U JPS63140061U JP S63140061 U JPS63140061 U JP S63140061U JP 3332887 U JP3332887 U JP 3332887U JP 3332887 U JP3332887 U JP 3332887U JP S63140061 U JPS63140061 U JP S63140061U
Authority
JP
Japan
Prior art keywords
sputtering
plate
targets
space
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3332887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3332887U priority Critical patent/JPS63140061U/ja
Publication of JPS63140061U publication Critical patent/JPS63140061U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP3332887U 1987-03-06 1987-03-06 Pending JPS63140061U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3332887U JPS63140061U (enrdf_load_stackoverflow) 1987-03-06 1987-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3332887U JPS63140061U (enrdf_load_stackoverflow) 1987-03-06 1987-03-06

Publications (1)

Publication Number Publication Date
JPS63140061U true JPS63140061U (enrdf_load_stackoverflow) 1988-09-14

Family

ID=30840842

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3332887U Pending JPS63140061U (enrdf_load_stackoverflow) 1987-03-06 1987-03-06

Country Status (1)

Country Link
JP (1) JPS63140061U (enrdf_load_stackoverflow)

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