JPS63140060U - - Google Patents
Info
- Publication number
- JPS63140060U JPS63140060U JP2974987U JP2974987U JPS63140060U JP S63140060 U JPS63140060 U JP S63140060U JP 2974987 U JP2974987 U JP 2974987U JP 2974987 U JP2974987 U JP 2974987U JP S63140060 U JPS63140060 U JP S63140060U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- shutter
- substrate holder
- chamber
- sputtering device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004544 sputter deposition Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2974987U JPS63140060U (es) | 1987-02-28 | 1987-02-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2974987U JPS63140060U (es) | 1987-02-28 | 1987-02-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63140060U true JPS63140060U (es) | 1988-09-14 |
Family
ID=30833918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2974987U Pending JPS63140060U (es) | 1987-02-28 | 1987-02-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63140060U (es) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011149086A (ja) * | 2009-12-22 | 2011-08-04 | Canon Anelva Corp | スパッタリング装置及び電子デバイスの製造方法 |
-
1987
- 1987-02-28 JP JP2974987U patent/JPS63140060U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011149086A (ja) * | 2009-12-22 | 2011-08-04 | Canon Anelva Corp | スパッタリング装置及び電子デバイスの製造方法 |