JPS6373359U - - Google Patents
Info
- Publication number
- JPS6373359U JPS6373359U JP16786386U JP16786386U JPS6373359U JP S6373359 U JPS6373359 U JP S6373359U JP 16786386 U JP16786386 U JP 16786386U JP 16786386 U JP16786386 U JP 16786386U JP S6373359 U JPS6373359 U JP S6373359U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- target
- substrate
- insulating layer
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 239000007769 metal material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16786386U JPS6373359U (es) | 1986-10-31 | 1986-10-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16786386U JPS6373359U (es) | 1986-10-31 | 1986-10-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6373359U true JPS6373359U (es) | 1988-05-16 |
Family
ID=31100197
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16786386U Pending JPS6373359U (es) | 1986-10-31 | 1986-10-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6373359U (es) |
-
1986
- 1986-10-31 JP JP16786386U patent/JPS6373359U/ja active Pending