JPH047651U - - Google Patents
Info
- Publication number
- JPH047651U JPH047651U JP4729290U JP4729290U JPH047651U JP H047651 U JPH047651 U JP H047651U JP 4729290 U JP4729290 U JP 4729290U JP 4729290 U JP4729290 U JP 4729290U JP H047651 U JPH047651 U JP H047651U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- substrate
- target
- faces
- central axis
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 238000005530 etching Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims 1
- 238000007872 degassing Methods 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Drying Of Semiconductors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4729290U JPH047651U (es) | 1990-05-02 | 1990-05-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4729290U JPH047651U (es) | 1990-05-02 | 1990-05-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH047651U true JPH047651U (es) | 1992-01-23 |
Family
ID=31563096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4729290U Pending JPH047651U (es) | 1990-05-02 | 1990-05-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH047651U (es) |
-
1990
- 1990-05-02 JP JP4729290U patent/JPH047651U/ja active Pending