JPS63139757U - - Google Patents
Info
- Publication number
- JPS63139757U JPS63139757U JP3154787U JP3154787U JPS63139757U JP S63139757 U JPS63139757 U JP S63139757U JP 3154787 U JP3154787 U JP 3154787U JP 3154787 U JP3154787 U JP 3154787U JP S63139757 U JPS63139757 U JP S63139757U
- Authority
- JP
- Japan
- Prior art keywords
- electrodes
- charged particle
- particle beam
- cylindrical member
- beam device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims 5
- 238000005192 partition Methods 0.000 claims 3
- 238000010894 electron beam technology Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3154787U JPH0521824Y2 (fr) | 1987-03-04 | 1987-03-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3154787U JPH0521824Y2 (fr) | 1987-03-04 | 1987-03-04 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS63139757U true JPS63139757U (fr) | 1988-09-14 |
JPH0521824Y2 JPH0521824Y2 (fr) | 1993-06-04 |
Family
ID=30837386
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3154787U Expired - Lifetime JPH0521824Y2 (fr) | 1987-03-04 | 1987-03-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0521824Y2 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010146833A1 (fr) * | 2009-06-16 | 2010-12-23 | 株式会社日立ハイテクノロジーズ | Dispositif de rayonnement à particules chargées |
-
1987
- 1987-03-04 JP JP3154787U patent/JPH0521824Y2/ja not_active Expired - Lifetime
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010146833A1 (fr) * | 2009-06-16 | 2010-12-23 | 株式会社日立ハイテクノロジーズ | Dispositif de rayonnement à particules chargées |
US8426835B2 (en) | 2009-06-16 | 2013-04-23 | Hitachi High-Technologies Corporation | Charged particle radiation device |
JP5406293B2 (ja) * | 2009-06-16 | 2014-02-05 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0521824Y2 (fr) | 1993-06-04 |
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