JPS63139757U - - Google Patents

Info

Publication number
JPS63139757U
JPS63139757U JP3154787U JP3154787U JPS63139757U JP S63139757 U JPS63139757 U JP S63139757U JP 3154787 U JP3154787 U JP 3154787U JP 3154787 U JP3154787 U JP 3154787U JP S63139757 U JPS63139757 U JP S63139757U
Authority
JP
Japan
Prior art keywords
electrodes
charged particle
particle beam
cylindrical member
beam device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3154787U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0521824Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3154787U priority Critical patent/JPH0521824Y2/ja
Publication of JPS63139757U publication Critical patent/JPS63139757U/ja
Application granted granted Critical
Publication of JPH0521824Y2 publication Critical patent/JPH0521824Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP3154787U 1987-03-04 1987-03-04 Expired - Lifetime JPH0521824Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3154787U JPH0521824Y2 (enrdf_load_stackoverflow) 1987-03-04 1987-03-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3154787U JPH0521824Y2 (enrdf_load_stackoverflow) 1987-03-04 1987-03-04

Publications (2)

Publication Number Publication Date
JPS63139757U true JPS63139757U (enrdf_load_stackoverflow) 1988-09-14
JPH0521824Y2 JPH0521824Y2 (enrdf_load_stackoverflow) 1993-06-04

Family

ID=30837386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3154787U Expired - Lifetime JPH0521824Y2 (enrdf_load_stackoverflow) 1987-03-04 1987-03-04

Country Status (1)

Country Link
JP (1) JPH0521824Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010146833A1 (ja) * 2009-06-16 2010-12-23 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010146833A1 (ja) * 2009-06-16 2010-12-23 株式会社日立ハイテクノロジーズ 荷電粒子線装置
US8426835B2 (en) 2009-06-16 2013-04-23 Hitachi High-Technologies Corporation Charged particle radiation device
JP5406293B2 (ja) * 2009-06-16 2014-02-05 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Also Published As

Publication number Publication date
JPH0521824Y2 (enrdf_load_stackoverflow) 1993-06-04

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