JPS63137729A - Dehumidifying device - Google Patents
Dehumidifying deviceInfo
- Publication number
- JPS63137729A JPS63137729A JP61284394A JP28439486A JPS63137729A JP S63137729 A JPS63137729 A JP S63137729A JP 61284394 A JP61284394 A JP 61284394A JP 28439486 A JP28439486 A JP 28439486A JP S63137729 A JPS63137729 A JP S63137729A
- Authority
- JP
- Japan
- Prior art keywords
- membrane
- temperature
- piping
- vacuum pump
- humidity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012528 membrane Substances 0.000 claims abstract description 33
- 238000000926 separation method Methods 0.000 claims description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 20
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 12
- 239000011248 coating agent Substances 0.000 abstract description 3
- 239000012466 permeate Substances 0.000 abstract description 3
- 239000011148 porous material Substances 0.000 abstract description 2
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 abstract description 2
- 238000007791 dehumidification Methods 0.000 description 6
- 238000001816 cooling Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000003079 width control Methods 0.000 description 1
Landscapes
- Drying Of Gases (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は除湿装置に関し、特にランニングコストが安価
に操業でき、主としてクリーンルームやｆ、ＳＩ工場の
ような厳しい湿度基準を求められる部屋を良好な制御性
によって除湿が可能な同装置に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a dehumidifying device, which can be operated at low running cost, and which can be used mainly for rooms that require strict humidity standards such as clean rooms, F, and SI factories. The present invention relates to a device that can dehumidify with controllability.
従来の除湿装置としては、冷凍除湿を原理とした除湿装
置がある。これは一定量の水分を含む９気の温度を下げ
て、その降下し次温度における飽和湿度との差分を水滴
として除去する装置である。この従来例について、第４
図に示す低温度湿度図を用いて説明する。第４図のグラ
フの横軸は温度（Ｃ）、縦軸は絶対湿度（ｋｙ・水蒸気
／ ｋｙ・乾き空気）を示す。As a conventional dehumidifier, there is a dehumidifier based on the principle of frozen dehumidification. This is a device that lowers the temperature of 9 air containing a certain amount of moisture and removes the difference between the temperature and the saturated humidity at the next temperature as water droplets. Regarding this conventional example, the fourth
This will be explained using the low temperature and humidity diagram shown in the figure. The horizontal axis of the graph in FIG. 4 shows temperature (C), and the vertical axis shows absolute humidity (ky/water vapor/ky/dry air).
入口側が温度３０Ｃ１絶対湿度０．０２ ＋ ５（相対
湿度８０％）の空気を絶対湿度０．０１０６（相対湿度
４０％）まで落とす場合には、入口条件点Ａより冷却す
ると、約２２Ｃ付近（点Ｂ）で水滴〔この時の絶対湿度
０．０１６６ （相対湿度１ｏｏｘ）３に生じ始め、更
に冷却を約けて約１５Ｃ’（点Ｃ）での飽和湿度が６０
Ｃでの絶対湿度ｏ、ｏ １Ｑ ６ （相対湿度４０％）
となる。If air at the inlet side has a temperature of 30C1 and an absolute humidity of 0.02 + 5 (relative humidity 80%) and is to be reduced to an absolute humidity of 0.0106 (relative humidity 40%), if the air is cooled from the inlet condition point A, it will drop to around 22C (point At B), water droplets started to form at an absolute humidity of 0.0166 (relative humidity 1 oox), and after further cooling, the saturated humidity at about 15 C' (point C) reached 60
Absolute humidity at C o, o 1Q 6 (relative humidity 40%)
becomes.
従来の冷却除湿の場合には、次の問題点がある。 Conventional cooling dehumidification has the following problems.
１）前述のケースで、３０Ｃ’、相対湿度４０％の空気
をつくるためには温度を１５ｔｌｌ’程度まで下げて再
加熱する必要があった。1) In the above case, in order to create air at 30C' and 40% relative humidity, it was necessary to lower the temperature to about 15tll' and reheat.
２）入口条件が変動する場合には、設定温度を変えてコ
ントロールするために、設定温度に対して±３Ｃ程度の
ばらつきがあり制御性が悪かった。2) When the inlet conditions fluctuate, control is performed by changing the set temperature, which results in a variation of approximately ±3C from the set temperature, resulting in poor controllability.
３）設定を変更して対応するまでに士数分ないし数十分
のオーダーの応答時間を必要とし追従性が悪かった。3) It required a response time of several minutes to several tens of minutes to respond to a change in settings, resulting in poor follow-up performance.
４）理論上は＋５Ｃまで温度を下げれば良いが、実際上
は１０〜１２Ｃ付近まで温度を下げて加湿操作を行って
いる。4) In theory, it is sufficient to lower the temperature to +5C, but in practice, the humidification operation is performed by lowering the temperature to around 10 to 12C.
５）以上のような問題点のために、クリーン・ルームや
ＬＳＩ工場のような厳しい湿度基準を求められる部屋の
除湿において製品の品質管理上問題があった。5) Due to the above-mentioned problems, there have been problems in product quality control when dehumidifying rooms that require strict humidity standards such as clean rooms and LSI factories.
本発明は上記従来の冷却除湿法におけるような欠点を生
じない除湿装置を提供しようとするものである。The present invention aims to provide a dehumidifying device that does not have the disadvantages of the conventional cooling dehumidifying method described above.
本発明者らは膜分離装置を用いた様々なプロセスを検討
した結果、従来の冷却除湿よりも装置費・ランニングコ
ストの安い、しかも入口の変動条件に対して制御性・応
答性の良好で、温度を下げずに湿度のみをコントロール
可能な除湿装ｅｆｔ見い出し、本発明を完成するに至つ
ムすなわち本発明は分離膜を介して一次側室と二次側室
に分離された膜分離装置、該分離装置の一次側室に配さ
れた入口空気ダクト及び出口空気ダクト、該入口及び／
又は出口ダクト内に配された温度・湿度計、該温度・湿
度計と連絡する制御装置、該制御装置と連絡する真空ポ
ンプ、該真空ポンプと前記分離装置の二次側室と連通ず
る配管及び該配管の途中に設けられた水分トラップより
なることを特徴とする除湿装置である。As a result of studying various processes using membrane separation equipment, the present inventors found that the equipment cost and running cost are lower than conventional cooling dehumidification, and it also has good controllability and responsiveness to fluctuating conditions at the inlet. After discovering a dehumidifier that can control only the humidity without lowering the temperature, we completed the present invention.In other words, the present invention is a membrane separation device that is separated into a primary side chamber and a secondary side chamber via a separation membrane, An inlet air duct and an outlet air duct arranged in the primary chamber of the device, the inlet and/or
or a temperature/hygrometer arranged in the outlet duct, a control device communicating with the temperature/hygrometer, a vacuum pump communicating with the control device, piping communicating the vacuum pump with the secondary side chamber of the separation device, and This dehumidification device is characterized by comprising a moisture trap installed in the middle of piping.
以下、本発明の一笑施態様ｔ−第１図によって説明する
。第１図において、１は入口空気ダクト、２は同ダクト
１に設けられた温度・湿度計、３は制御装置、４は真空
ポンプ、５は膜分離装置、５Ａはその一次側室、５Ｂは
二次側室、６は分離膜、７はトラップ、８は分離水配管
、９は除湿空気出口ダクトである。Hereinafter, a simple embodiment of the present invention will be explained with reference to FIG. In Fig. 1, 1 is an inlet air duct, 2 is a temperature/hygrometer installed in the duct 1, 3 is a control device, 4 is a vacuum pump, 5 is a membrane separation device, 5A is its primary side chamber, and 5B is a secondary chamber. In the next side chamber, 6 is a separation membrane, 7 is a trap, 8 is a separated water pipe, and 9 is a dehumidified air outlet duct.
水蒸気を含む入口空気のダクト１中に温度・湿度計２を
挿入し、制御装置３ｆ：経由して真空ポンプ４に接続す
る。一方、膜分離装置５は、例、ｔばアルミナ担体にア
ルミナゾルを塗布した膜のような水蒸気を含むガスから
水蒸気のみを選択的に透過する性質をもつ膜６ｔ−使用
している。A temperature/hygrometer 2 is inserted into a duct 1 for inlet air containing water vapor, and connected to a vacuum pump 4 via a control device 3f. On the other hand, the membrane separation device 5 uses a membrane 6t, which has a property of selectively permeating only water vapor from a gas containing water vapor, such as a membrane made of an alumina carrier coated with alumina sol.
水蒸気を含む空気は、ダクト１ｔ−経て常圧で膜分離装
置５の一次側５−Ａに入る。二次側５−Ｂを真空ポンプ
４よす、５〜２ ｇ ７ｏｒｒ 程度に減圧する。Ｍ
４６ｆ通して水分のみが透過し、トラップ７よジ分離水
配管８を経て水が得られ、除湿された空気は除湿空気配
管９ｔ−経て膜分離装ｇｔ５よジ排出される。Air containing water vapor enters the primary side 5-A of the membrane separator 5 at normal pressure through the duct 1t-. The pressure on the secondary side 5-B is reduced to about 5 to 2 g 7 orr using the vacuum pump 4. M
Only moisture permeates through 46f, water is obtained through trap 7 and separated water piping 8, and dehumidified air is discharged through membrane separator gt5 through dehumidified air piping 9t.
本発明における膜分離装置１ｔ５の膜６としては、水蒸
気のみを選択的に透過する性質の膜であればよいが、数
ミクロン程度の細孔を有する担体、例えばアルミナ担体
、ジルコニア、ムライト等に、シリカゾル、シリカアル
ミナゾル、チタニアゾル等の塗布剤を塗布した膜等が挙
げられ、排ガスの種類に応じて適宜選択すれば良い。The membrane 6 of the membrane separator 1t5 in the present invention may be any membrane that selectively permeates only water vapor, but it may be made of a carrier having pores of several microns, such as an alumina carrier, zirconia, mullite, etc. Examples include a film coated with a coating agent such as silica sol, silica alumina sol, titania sol, etc., and may be appropriately selected depending on the type of exhaust gas.
さて、このような凝縮性ガス分離膜における水蒸気透過
量は、次の（１１式にて表わされる。Now, the amount of water vapor permeation in such a condensable gas separation membrane is expressed by the following (Equation 11).
Ｆ＝Ａｔ−Ｒ・（ｐ、・ψ−Ｐ２ｙ）山ここで、Ｆ；水
の透過量（＋ｍｏＪ？／Ｈｒ ）Ａｔ；膜面積 （ＩＩ
’）
Ｒ；透過係数（ｗ＋ｏ／／ｍ −Ｈｒ−Ｔｏｒｒ ）Ｐ
８；その温度における一次側の飽和蒸気圧（Ｔｏｒｒ
）
ψ；相対湿度（％）
Ｐ２；真空ポンプの圧力（Ｔｏｒｒ ）ｙ；二次側の水
蒸気モル分率（−）
Ｔ１３式において、二次側の水蒸気モル分率は、ｙ−１
であり、膜を規定すれば、 ｋｔ−Ｒは一定である。F=At-R・(p,・ψ-P2y) MountainHere, F: Water permeation amount (+moJ?/Hr) At: Membrane area (II
') R; Permeability coefficient (w+o//m -Hr-Torr)P
8; Saturated vapor pressure on the primary side at that temperature (Torr
) ψ: Relative humidity (%) P2: Vacuum pump pressure (Torr) y: Mole fraction of water vapor on the secondary side (-) In formula T13, the mole fraction of water vapor on the secondary side is y-1
, and if the membrane is defined, kt-R is constant.
それ故、入口側の温・湿度′５−測定して、Ｐ８とψを
求め透過ｔＦを設定すれば、Ｐ２をコントロールするこ
とにより定湿度運転又は一定量透過運転全容易に行うこ
とができる。Therefore, by measuring the temperature and humidity '5- on the inlet side, finding P8 and ψ, and setting the permeation tF, constant humidity operation or constant amount permeation operation can be easily performed by controlling P2.
（実施例１）
温度３０Ｃ１湿度８０％の入口供給空気を急激に湿度９
０％にし次時の追従性を実験した。(Example 1) Inlet supply air with a temperature of 30C and a humidity of 80% is suddenly changed to a humidity of 9C.
0%, and the following followability was tested.
部屋の大きさは、６６ｍ Ｘ２ｍ 高さであり、入
口の供給ドライ空気（ｍｌ ｆ ５００ ｍ３／’ｈｒ
とした。The size of the room is 66m x 2m high and the inlet supply dry air (ml f 500 m3/'hr
And so.
従来のタイプとしての大型のエアコン及び加熱器、加湿
器を用いた場合と、第１図に示し次ような装置で直径１
０ｙ＊φ、長さ１ｍのアルミナ担体にアルミナゾル全塗
布し几膜面積２０ｍ２の膜を使用した本実施例の場合と
の比較結果を第２図に示す。なお部屋内部の設定湿度ヲ
５５％とし九。In the case of using a large air conditioner, heater, and humidifier as a conventional type, and in the case of using the following equipment as shown in Figure 1,
FIG. 2 shows the results of comparison with the present example in which a membrane having a membrane area of 20 m2 was used, in which an alumina carrier having a diameter of 0y*φ and a length of 1 m was completely coated with alumina sol. The humidity inside the room is set at 55%.
従来装置の場合は変動巾が湿度にして±５Ｘ程度あり、
追従するのに約２０分根度かかつているが、本発明の実
施例による分離膜の場合は変動巾が湿度にして±１．５
％程度であり追従するのに２〜３分で充分であった。In the case of conventional equipment, the fluctuation range is about ±5X in terms of humidity.
It takes about 20 minutes to follow up, but in the case of the separation membrane according to the embodiment of the present invention, the range of fluctuation is ±1.5 in terms of humidity.
%, and 2 to 3 minutes was sufficient to follow up.
（実施例２）
実施例１においては、アルミナ担体にアルミナゾルを塗
付し次分離膜を使用したが、ジルコニア担体にシリカア
ルミナゾルを塗布した膜以外は、実施例１と全く同じ条
件で試験を行ったところ、第２図と全く同じ結果、制御
性・追従性が良いことを確認した。(Example 2) In Example 1, an alumina sol was applied to an alumina carrier and a separation membrane was used. However, the test was conducted under exactly the same conditions as in Example 1 except for the membrane in which a zirconia support was applied with silica alumina sol. The results were exactly the same as those shown in Figure 2, and it was confirmed that the controllability and followability were good.
（実施例３）
温度３０Ｃ，湿度６ＯＮの入口供給空気を湿度９０Ｘに
した時の追従性ｔ−実験した。部屋の大きさ及び入口の
供給ドライ空気量は、実施例１と同様である。膜は、直
径１０１ＩＩＩφ、長さ１ｍのアルミナ担体にアルミナ
ゾル全塗布し次もの使用した。膜面積は２０ｍとした。(Example 3) An experiment was conducted on followability t when the inlet supply air at a temperature of 30C and a humidity of 6ON was changed to a humidity of 90X. The size of the room and the amount of dry air supplied at the inlet are the same as in Example 1. The following membrane was prepared by completely coating an alumina carrier with a diameter of 101IIIφ and a length of 1 m with alumina sol. The membrane area was 20 m.
部屋内部の設定湿度を５５％とした。試験結果を、第３
図に示す。入口の変動が大きい程、分離膜を使用し九本
発明除湿装置が有効であること全確証した。The humidity inside the room was set at 55%. Please send the test results to the third
As shown in the figure. It has been completely confirmed that the dehumidifying device of the present invention is more effective when the inlet fluctuation is large, using a separation membrane.
以上、本発明の実施例では温度・湿度計、制御装置及び
真空ポンプとの相関々係については説明していないが、
これらは当業者ならば容易に理解しうろことであるので
その説明を省略したものである。Although the embodiments of the present invention do not explain the relationship between the temperature/hygrometer, the control device, and the vacuum pump,
Since these are easily understood by those skilled in the art, their explanation is omitted.
本発明は、冷却除湿による従来装置と比較して、次のよ
うな特長をもつ。The present invention has the following features compared to conventional devices using cooling dehumidification.
１）＠度を下げずに除湿ができ、従来装置と比較して１
５〜２０％ランニングコストカ安クプロセスり簡単であ
る。1) Can dehumidify without lowering the temperature, 1% compared to conventional equipment
The running cost is 5-20% low and the process is simple.
２）入口の変動に対して制御が容易である。2) It is easy to control inlet fluctuations.
３）応答が数分以内である。3) Response is within a few minutes.
４）真空ポンプの真空度を変えるために、細かい巾の制
御が可能である。4) Fine width control is possible to change the degree of vacuum of the vacuum pump.
５）湿度が製品に影響金与えるような工場の除湿に有用
である。5) Useful for dehumidifying factories where humidity affects products.
第１図は、本発明の実施態様を説明する図、第２図、第
３図は本発明の実施例による効果を説明する図表、第４
図は従来の低温除湿を説明するための低温度湿度図表で
ある。
復代理人 内 １） 明
復代理人 萩 原 亮 −
復代理人 安 西 篤 夫
第１図
第２図
経過時間（分）
経 過 哨 間 （分）FIG. 1 is a diagram explaining the embodiment of the present invention, FIGS. 2 and 3 are diagrams explaining the effects of the embodiment of the present invention, and FIG.
The figure is a low temperature and humidity chart for explaining conventional low temperature dehumidification. Sub-agent 1) Meifuku agent Ryo Hagiwara - Sub-agent Atsuo Anzai Figure 1 Figure 2 Elapsed time (minutes) Elapsed time (minutes)
Claims (1)
装置、該分離装置の一次側室に配された入口空気ダクト
及び出口空気ダクト、該入口及び／又は出口ダクト内に
配された温度・湿度計、該温度・湿度計と連絡する制御
装置、該制御装置と連絡する真空ポンプ、該真空ポンプ
と前記分離装置の二次側室と連通する配管及び該配管の
途中に設けられた水分トラップよりなることを特徴とす
る除湿装置。A membrane separation device separated into a primary side chamber and a secondary side chamber via a separation membrane, an inlet air duct and an outlet air duct arranged in the primary side chamber of the separation device, and a temperature arranged in the inlet and/or outlet duct.・A hygrometer, a control device that communicates with the temperature/hygrometer, a vacuum pump that communicates with the control device, piping that communicates between the vacuum pump and the secondary side chamber of the separation device, and a moisture trap installed in the middle of the piping. A dehumidifying device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61284394A JPS63137729A (en) | 1986-12-01 | 1986-12-01 | Dehumidifying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61284394A JPS63137729A (en) | 1986-12-01 | 1986-12-01 | Dehumidifying device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63137729A true JPS63137729A (en) | 1988-06-09 |
Family
ID=17678001
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61284394A Pending JPS63137729A (en) | 1986-12-01 | 1986-12-01 | Dehumidifying device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63137729A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5053058A (en) * | 1989-12-29 | 1991-10-01 | Uop | Control process and apparatus for membrane separation systems |
| US5118327A (en) * | 1989-10-05 | 1992-06-02 | Andrew Corporation | Dehumidifier for supplying gas having controlled dew point |
| US5681368A (en) * | 1995-07-05 | 1997-10-28 | Andrew Corporation | Dehumidifier system using membrane cartridge |
| US6497749B2 (en) * | 2001-03-30 | 2002-12-24 | United Technologies Corporation | Dehumidification process and apparatus using collodion membrane |
| WO2017022129A1 (en) * | 2015-08-06 | 2017-02-09 | 株式会社 東芝 | Ventilation device and air conditioning device |
| JP2018031548A (en) * | 2016-08-25 | 2018-03-01 | 株式会社東芝 | Air conditioner |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6354920A (en) * | 1986-08-26 | 1988-03-09 | Matsushita Electric Works Ltd | Dehumidifier |
-
1986
- 1986-12-01 JP JP61284394A patent/JPS63137729A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6354920A (en) * | 1986-08-26 | 1988-03-09 | Matsushita Electric Works Ltd | Dehumidifier |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5118327A (en) * | 1989-10-05 | 1992-06-02 | Andrew Corporation | Dehumidifier for supplying gas having controlled dew point |
| US5053058A (en) * | 1989-12-29 | 1991-10-01 | Uop | Control process and apparatus for membrane separation systems |
| US5681368A (en) * | 1995-07-05 | 1997-10-28 | Andrew Corporation | Dehumidifier system using membrane cartridge |
| US6497749B2 (en) * | 2001-03-30 | 2002-12-24 | United Technologies Corporation | Dehumidification process and apparatus using collodion membrane |
| WO2017022129A1 (en) * | 2015-08-06 | 2017-02-09 | 株式会社 東芝 | Ventilation device and air conditioning device |
| JPWO2017022129A1 (en) * | 2015-08-06 | 2017-09-21 | 株式会社東芝 | Ventilation device and air conditioner |
| JP2018031548A (en) * | 2016-08-25 | 2018-03-01 | 株式会社東芝 | Air conditioner |
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