JPS63136636U - - Google Patents
Info
- Publication number
- JPS63136636U JPS63136636U JP2971387U JP2971387U JPS63136636U JP S63136636 U JPS63136636 U JP S63136636U JP 2971387 U JP2971387 U JP 2971387U JP 2971387 U JP2971387 U JP 2971387U JP S63136636 U JPS63136636 U JP S63136636U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- substrate
- arm
- suction plate
- support member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2971387U JPS63136636U (US20100268047A1-20101021-C00003.png) | 1987-02-27 | 1987-02-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2971387U JPS63136636U (US20100268047A1-20101021-C00003.png) | 1987-02-27 | 1987-02-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63136636U true JPS63136636U (US20100268047A1-20101021-C00003.png) | 1988-09-08 |
Family
ID=30833847
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2971387U Pending JPS63136636U (US20100268047A1-20101021-C00003.png) | 1987-02-27 | 1987-02-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63136636U (US20100268047A1-20101021-C00003.png) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0522429U (ja) * | 1991-08-31 | 1993-03-23 | 山形日本電気株式会社 | ベローズ形ウエーハ真空チヤツク |
| JPWO2004100254A1 (ja) * | 2003-05-06 | 2006-07-13 | オリンパス株式会社 | 基板吸着装置 |
| KR100730241B1 (ko) | 2003-01-07 | 2007-06-19 | 에스펙 가부시키가이샤 | 흡착 패드 |
| JP2011173732A (ja) * | 2011-04-25 | 2011-09-08 | Ihi Corp | 基板搭載方法および基板取出方法 |
| JP2012040657A (ja) * | 2010-08-20 | 2012-03-01 | Ihi Corp | 真空吸着装置 |
| JP2014177299A (ja) * | 2013-03-15 | 2014-09-25 | Lintec Corp | シート貼付装置および貼付方法 |
| JP2019042826A (ja) * | 2017-08-30 | 2019-03-22 | 平田機工株式会社 | 保持ノズル、保持ヘッド及び移載装置 |
-
1987
- 1987-02-27 JP JP2971387U patent/JPS63136636U/ja active Pending
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0522429U (ja) * | 1991-08-31 | 1993-03-23 | 山形日本電気株式会社 | ベローズ形ウエーハ真空チヤツク |
| KR100730241B1 (ko) | 2003-01-07 | 2007-06-19 | 에스펙 가부시키가이샤 | 흡착 패드 |
| JPWO2004100254A1 (ja) * | 2003-05-06 | 2006-07-13 | オリンパス株式会社 | 基板吸着装置 |
| JP4553841B2 (ja) * | 2003-05-06 | 2010-09-29 | オリンパス株式会社 | 基板吸着装置 |
| KR101055911B1 (ko) * | 2003-05-06 | 2011-08-10 | 올림푸스 가부시키가이샤 | 기판 흡착 장치 |
| JP2012040657A (ja) * | 2010-08-20 | 2012-03-01 | Ihi Corp | 真空吸着装置 |
| JP2011173732A (ja) * | 2011-04-25 | 2011-09-08 | Ihi Corp | 基板搭載方法および基板取出方法 |
| JP2014177299A (ja) * | 2013-03-15 | 2014-09-25 | Lintec Corp | シート貼付装置および貼付方法 |
| JP2019042826A (ja) * | 2017-08-30 | 2019-03-22 | 平田機工株式会社 | 保持ノズル、保持ヘッド及び移載装置 |
| US10562194B2 (en) | 2017-08-30 | 2020-02-18 | Hirata Corporation | Holding nozzle, holding head and transportation apparatus |
