JPS63135975U - - Google Patents

Info

Publication number
JPS63135975U
JPS63135975U JP2908887U JP2908887U JPS63135975U JP S63135975 U JPS63135975 U JP S63135975U JP 2908887 U JP2908887 U JP 2908887U JP 2908887 U JP2908887 U JP 2908887U JP S63135975 U JPS63135975 U JP S63135975U
Authority
JP
Japan
Prior art keywords
single crystal
crucible
melt
raw materials
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2908887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523580Y2 (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2908887U priority Critical patent/JPH0523580Y2/ja
Publication of JPS63135975U publication Critical patent/JPS63135975U/ja
Application granted granted Critical
Publication of JPH0523580Y2 publication Critical patent/JPH0523580Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP2908887U 1987-02-27 1987-02-27 Expired - Lifetime JPH0523580Y2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2908887U JPH0523580Y2 (fr) 1987-02-27 1987-02-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2908887U JPH0523580Y2 (fr) 1987-02-27 1987-02-27

Publications (2)

Publication Number Publication Date
JPS63135975U true JPS63135975U (fr) 1988-09-07
JPH0523580Y2 JPH0523580Y2 (fr) 1993-06-16

Family

ID=30832657

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2908887U Expired - Lifetime JPH0523580Y2 (fr) 1987-02-27 1987-02-27

Country Status (1)

Country Link
JP (1) JPH0523580Y2 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991013192A1 (fr) * 1990-03-02 1991-09-05 Nkk Corporation Appareil de production de monocristaux
JPH05105578A (ja) * 1991-10-17 1993-04-27 Shin Etsu Handotai Co Ltd 単結晶引上装置
JPH05163095A (ja) * 1991-12-12 1993-06-29 Shin Etsu Handotai Co Ltd 単結晶引上装置
WO2023007830A1 (fr) * 2021-07-30 2023-02-02 グローバルウェーハズ・ジャパン株式会社 Procédé de production de monocristal de silicium, et appareil de tirage de monocristal

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991013192A1 (fr) * 1990-03-02 1991-09-05 Nkk Corporation Appareil de production de monocristaux
JPH05105578A (ja) * 1991-10-17 1993-04-27 Shin Etsu Handotai Co Ltd 単結晶引上装置
JPH05163095A (ja) * 1991-12-12 1993-06-29 Shin Etsu Handotai Co Ltd 単結晶引上装置
WO2023007830A1 (fr) * 2021-07-30 2023-02-02 グローバルウェーハズ・ジャパン株式会社 Procédé de production de monocristal de silicium, et appareil de tirage de monocristal

Also Published As

Publication number Publication date
JPH0523580Y2 (fr) 1993-06-16

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