JPS63134544U - - Google Patents
Info
- Publication number
- JPS63134544U JPS63134544U JP2575387U JP2575387U JPS63134544U JP S63134544 U JPS63134544 U JP S63134544U JP 2575387 U JP2575387 U JP 2575387U JP 2575387 U JP2575387 U JP 2575387U JP S63134544 U JPS63134544 U JP S63134544U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- bernoulli
- wafer chuck
- uehachiatsuk
- tenaru
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000000463 material Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000011148 porous material Substances 0.000 description 1
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2575387U JPS63134544U (ru) | 1987-02-24 | 1987-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2575387U JPS63134544U (ru) | 1987-02-24 | 1987-02-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63134544U true JPS63134544U (ru) | 1988-09-02 |
Family
ID=30826199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2575387U Pending JPS63134544U (ru) | 1987-02-24 | 1987-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63134544U (ru) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0450128A (ja) * | 1990-06-15 | 1992-02-19 | Olympus Optical Co Ltd | 吸着保持装置 |
| JP2010527805A (ja) * | 2007-05-31 | 2010-08-19 | ヨナス アンド レードマン アウトマーツィオーンズテヒニク ゲーエムベーハー | ベルヌーイ・グリッパからなるグリッパ |
| JP2015070002A (ja) * | 2013-09-26 | 2015-04-13 | 株式会社ディスコ | 板状物の搬送装置 |
-
1987
- 1987-02-24 JP JP2575387U patent/JPS63134544U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0450128A (ja) * | 1990-06-15 | 1992-02-19 | Olympus Optical Co Ltd | 吸着保持装置 |
| JP2010527805A (ja) * | 2007-05-31 | 2010-08-19 | ヨナス アンド レードマン アウトマーツィオーンズテヒニク ゲーエムベーハー | ベルヌーイ・グリッパからなるグリッパ |
| JP2015070002A (ja) * | 2013-09-26 | 2015-04-13 | 株式会社ディスコ | 板状物の搬送装置 |