JPS63134052A - シ−ト状物のプラズマ処理装置 - Google Patents

シ−ト状物のプラズマ処理装置

Info

Publication number
JPS63134052A
JPS63134052A JP28116586A JP28116586A JPS63134052A JP S63134052 A JPS63134052 A JP S63134052A JP 28116586 A JP28116586 A JP 28116586A JP 28116586 A JP28116586 A JP 28116586A JP S63134052 A JPS63134052 A JP S63134052A
Authority
JP
Japan
Prior art keywords
electrode
discharge
discharge electrode
rod
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP28116586A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0475778B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Motoyasu Koyama
小山　元靖
Hideaki Teraoka
寺岡　英朗
Takao Akagi
赤木　孝夫
Shinji Yamaguchi
新司 山口
Takashi Sakamoto
隆志 坂本
Akira Nanba
難波　明
Isao Okagaki
岡垣　勲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kuraray Co Ltd
Original Assignee
Kuraray Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kuraray Co Ltd filed Critical Kuraray Co Ltd
Priority to JP28116586A priority Critical patent/JPS63134052A/ja
Publication of JPS63134052A publication Critical patent/JPS63134052A/ja
Publication of JPH0475778B2 publication Critical patent/JPH0475778B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treatment Of Fiber Materials (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
JP28116586A 1986-11-25 1986-11-25 シ−ト状物のプラズマ処理装置 Granted JPS63134052A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28116586A JPS63134052A (ja) 1986-11-25 1986-11-25 シ−ト状物のプラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28116586A JPS63134052A (ja) 1986-11-25 1986-11-25 シ−ト状物のプラズマ処理装置

Publications (2)

Publication Number Publication Date
JPS63134052A true JPS63134052A (ja) 1988-06-06
JPH0475778B2 JPH0475778B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-12-01

Family

ID=17635256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28116586A Granted JPS63134052A (ja) 1986-11-25 1986-11-25 シ−ト状物のプラズマ処理装置

Country Status (1)

Country Link
JP (1) JPS63134052A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006351437A (ja) * 2005-06-17 2006-12-28 National Institute Of Advanced Industrial & Technology 表面処理装置及び表面処理方法
JP2009102744A (ja) * 2009-01-23 2009-05-14 Mitsubishi Heavy Ind Ltd プラズマｃｖｄ装置とプラズマｃｖｄ装置用電極
JP2009123513A (ja) * 2007-11-14 2009-06-04 Emd:Kk プラズマ処理装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006351437A (ja) * 2005-06-17 2006-12-28 National Institute Of Advanced Industrial & Technology 表面処理装置及び表面処理方法
JP2009123513A (ja) * 2007-11-14 2009-06-04 Emd:Kk プラズマ処理装置
JP2009102744A (ja) * 2009-01-23 2009-05-14 Mitsubishi Heavy Ind Ltd プラズマｃｖｄ装置とプラズマｃｖｄ装置用電極

Also Published As

Publication number Publication date
JPH0475778B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-12-01

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees