JPS631338U - - Google Patents
Info
- Publication number
- JPS631338U JPS631338U JP9422786U JP9422786U JPS631338U JP S631338 U JPS631338 U JP S631338U JP 9422786 U JP9422786 U JP 9422786U JP 9422786 U JP9422786 U JP 9422786U JP S631338 U JPS631338 U JP S631338U
- Authority
- JP
- Japan
- Prior art keywords
- light emitting
- sections
- light
- alignment device
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Description
第１図は本考案による一実施例を示す平面図、
第２図は本考案による一実施例を示す側面図、第
３図は従来技術による例を示す平面図、第４図は
従来技術による実施例を示す側面図、である。
図において、１はウエーハ、１ａはオリエンテ
ーシヨンフラツト、２はウエーハステージ、３は
発光部Ａ、４は受光部Ａ、５は発光部Ｂ、６は受
光部Ｂ、７はローラー、８は発光部、９は受光部
、を示す。
FIG. 1 is a plan view showing an embodiment of the present invention;
FIG. 2 is a side view showing an embodiment according to the present invention, FIG. 3 is a plan view showing an example according to the prior art, and FIG. 4 is a side view showing an embodiment according to the prior art. In the figure, 1 is a wafer, 1a is an orientation flat, 2 is a wafer stage, 3 is a light emitting part A, 4 is a light receiving part A, 5 is a light emitting part B, 6 is a light receiving part B, 7 is a roller, and 8 is a 9 shows a light-emitting part and 9 a light-receiving part.
Claims (1)
する発光部３，５と該発光部３，５と対向する受
光部４，６を二組有し、該発光部５と該受光部６
をオリエンテーシヨンフラツトと平行して配設さ
せたことを特徴とするウエーハアライメント装置
。 It has two sets of light emitting sections 3 and 5 that emit light beams from a horizontal direction onto one wafer surface, and light receiving sections 4 and 6 that face the light emitting sections 3 and 5, the light emitting section 5 and the light receiving section 6.
A wafer alignment device characterized in that a wafer alignment device is arranged in parallel with an orientation flat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9422786U JPS631338U (en) | 1986-06-19 | 1986-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9422786U JPS631338U (en) | 1986-06-19 | 1986-06-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS631338U true JPS631338U (en) | 1988-01-07 |
Family
ID=30957482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9422786U Pending JPS631338U (en) | 1986-06-19 | 1986-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS631338U (en) |
-
1986
- 1986-06-19 JP JP9422786U patent/JPS631338U/ja active Pending