JPS63133440A - Atom, molecule, and ion bean gun - Google Patents
Atom, molecule, and ion bean gunInfo
- Publication number
- JPS63133440A JPS63133440A JP61278199A JP27819986A JPS63133440A JP S63133440 A JPS63133440 A JP S63133440A JP 61278199 A JP61278199 A JP 61278199A JP 27819986 A JP27819986 A JP 27819986A JP S63133440 A JPS63133440 A JP S63133440A
- Authority
- JP
- Japan
- Prior art keywords
- molecule
- atom
- single crystal
- passed
- crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000010627 Phaseolus vulgaris Nutrition 0.000 title 1
- 244000046052 Phaseolus vulgaris Species 0.000 title 1
- 239000013078 crystal Substances 0.000 claims abstract description 15
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 9
- 230000007547 defect Effects 0.000 claims abstract description 7
- 125000004429 atom Chemical group 0.000 abstract description 11
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract description 3
- 239000007789 gas Substances 0.000 abstract description 2
- 239000001257 hydrogen Substances 0.000 abstract description 2
- 229910052739 hydrogen Inorganic materials 0.000 abstract description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 abstract description 2
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 229910052697 platinum Inorganic materials 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 230000005855 radiation Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000011344 liquid material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910052705 radium Inorganic materials 0.000 description 1
- HCWPIIXVSYCSAN-UHFFFAOYSA-N radium atom Chemical compound [Ra] HCWPIIXVSYCSAN-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は極めて細い原子あるいは分子あるいはラジカル
あるいはイオンのビームを放射するビーム銃先端構造に
関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a beam gun tip structure that emits an extremely narrow beam of atoms, molecules, radicals, or ions.
従来、イオン・ビーム銃の先端構造としては、タングス
テン線針の先端に所望原子を濡らして放射させる方法が
最も一般的に用いられていた。Conventionally, the most commonly used tip structure for an ion beam gun has been a method in which the tip of a tungsten wire needle is wetted with desired atoms and emitted.
しかし、上°記従来技術によると、タングステン線針の
先端径によって、ビーム径がバラツキ、且つ放射雰囲気
が真空の場合には真空度が上がらないという問題点等が
あった。However, according to the above-mentioned prior art, there are problems such as the beam diameter varies depending on the tip diameter of the tungsten wire needle, and the degree of vacuum cannot be increased when the radiation atmosphere is a vacuum.
本発明は、かかる従来技術の問題点をなくし、原子・分
子あるいはラジカルを１個づつ順番に送り出し、放出す
るビーム径のバラツキのないイオン・ビーム銃を高真空
中に放出するビーム銃先端構造を提供する事を目的とす
る◎
〔問題点を解決するための手段〕
上記問題点を解決するために、本発明は、原子・分子ビ
ーム銃に於て、単結晶体内の結晶欠陥部に原子あるいは
分子を通過させる手段をとる。The present invention eliminates the problems of the prior art and provides a beam gun tip structure that sequentially sends out atoms, molecules, or radicals one by one and releases an ion beam gun into a high vacuum with no variation in the emitted beam diameter. ◎ [Means for solving the problems] In order to solve the above problems, the present invention provides an atomic/molecular beam gun that injects atoms or Take measures to allow molecules to pass through.
単結晶体内の転位は、原子の格子のすき間と考える事が
出来、この原子のすき間には水素ガス体等は原子状ある
いは分子状あるいはラジカル状にて、極めて通過し易い
状態となり、これらの原子・分子を１個づつすき間を通
過させ放射させる事が出来る作・用がある◇
〔実施例〕
以下、実施例により本発明を詳述する０第１図は本発明
の一実施例を示す原子・分子ビーム銃先端の模式図であ
る０すなわち、Ｓｌあるいは、Ａｕｑ Ｗｓ Ｍ２Ｓ
Ｐｔ等から成る単結晶格子１内に存在する結晶欠陥２に
は、一方に存在する水素（Ｈｌ）等の原子あるいは分子
のガス３あるいは液体材が１個づつ通過し、この場合に
はＨ１＊ ＋はＨの
ラジウムとなって通過し、他方にＨのイオン・ビーム５
となって放射されて成る０尚、単結晶格子１０表面は、
エツチングにより結晶欠陥位置が確認されて成る。更に
結晶欠陥は螺旋転位であっても良い事は言うまでもない
。更に、単結晶体は単一金属に限らず合金でも良く、更
にはセラミックあるいは高分子体であっても良い事は言
うまでもない。Dislocations in a single crystal can be thought of as gaps in the lattice of atoms, and hydrogen gas, etc., can pass through these gaps in atomic, molecular, or radical form very easily, and these atoms・It has the effect of allowing molecules to pass through gaps one by one and emit radiation. ◇ [Example] The present invention will be explained in detail with reference to examples below. Figure 1 shows an atomic diagram showing an example of the present invention.・Schematic diagram of the tip of the molecular beam gun 0, that is, Sl or Auq Ws M2S
Atom or molecular gas 3 or liquid material such as hydrogen (Hl) existing on one side passes through crystal defects 2 existing in a single crystal lattice 1 made of Pt or the like, one by one, and in this case, H1* + passes through as H radium, and the other H ion beam 5
The surface of the single crystal lattice 10 is radiated as
The location of crystal defects is confirmed by etching. Furthermore, it goes without saying that the crystal defect may be a screw dislocation. Furthermore, it goes without saying that the single crystal body is not limited to a single metal, but may be an alloy, or even a ceramic or a polymer.
本発明による原子・分子あるいはイオン・ビーム銃先端
構造によると極めて細いこれらビームを、高真空中に放
射できる効果がある０The tip structure of the atom/molecule or ion beam gun according to the present invention has the effect of emitting extremely narrow beams into a high vacuum.
第１図は本発明の一実施例を示す、原子・分子ビーム銃
先端模式図である０
１・・・単結晶格子
２・・・結晶欠陥
３・・・ガス
４・・・ラジカル
５・・・イオン・ビーム
以 上
出願人 セイコーエプソン株式会社
“１”＊［ｆ ＃ ｌで、、ａ １４
””Ｊ：＋ン
３２７”ス
］Fig. 1 is a schematic diagram of the tip of an atomic/molecular beam gun showing an embodiment of the present invention.・Ion Beam and above Applicant: Seiko Epson Corporation “1” * [f#l,,a14””J:+n327”]
Claims (1)
る事を特徴とする原子・分子・イオンビーム銃。An atom/molecule/ion beam gun that allows atoms or molecules to pass through crystal defects within a single crystal.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61278199A JPS63133440A (en) | 1986-11-21 | 1986-11-21 | Atom, molecule, and ion bean gun |
| KR1019870011307A KR930001889B1 (en) | 1986-10-13 | 1987-10-13 | Ion beam exposure mask |
| US07/107,424 US4902897A (en) | 1986-10-13 | 1987-10-13 | Ion beam gun and ion beam exposure device |
| KR1019920019579A KR930001433B1 (en) | 1986-10-13 | 1992-10-23 | Ion-beam gun |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61278199A JPS63133440A (en) | 1986-11-21 | 1986-11-21 | Atom, molecule, and ion bean gun |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63133440A true JPS63133440A (en) | 1988-06-06 |
Family
ID=17593977
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61278199A Pending JPS63133440A (en) | 1986-10-13 | 1986-11-21 | Atom, molecule, and ion bean gun |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63133440A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63119135A (en) * | 1986-11-06 | 1988-05-23 | Seiko Epson Corp | Ion beam gun |
-
1986
- 1986-11-21 JP JP61278199A patent/JPS63133440A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63119135A (en) * | 1986-11-06 | 1988-05-23 | Seiko Epson Corp | Ion beam gun |
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