JPS63131757U - - Google Patents
Info
- Publication number
- JPS63131757U JPS63131757U JP2482887U JP2482887U JPS63131757U JP S63131757 U JPS63131757 U JP S63131757U JP 2482887 U JP2482887 U JP 2482887U JP 2482887 U JP2482887 U JP 2482887U JP S63131757 U JPS63131757 U JP S63131757U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- bias voltage
- self
- matching circuit
- film forming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987024828U JPH0623568Y2 (ja) | 1987-02-21 | 1987-02-21 | グロ−放電型成膜装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987024828U JPH0623568Y2 (ja) | 1987-02-21 | 1987-02-21 | グロ−放電型成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63131757U true JPS63131757U (US06826419-20041130-M00005.png) | 1988-08-29 |
| JPH0623568Y2 JPH0623568Y2 (ja) | 1994-06-22 |
Family
ID=30824407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987024828U Expired - Lifetime JPH0623568Y2 (ja) | 1987-02-21 | 1987-02-21 | グロ−放電型成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0623568Y2 (US06826419-20041130-M00005.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010077452A (ja) * | 2007-10-04 | 2010-04-08 | Canon Anelva Corp | 高周波スパッタリング装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59183827A (ja) * | 1983-03-31 | 1984-10-19 | Japan Synthetic Rubber Co Ltd | プラズマ連続処理装置 |
-
1987
- 1987-02-21 JP JP1987024828U patent/JPH0623568Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59183827A (ja) * | 1983-03-31 | 1984-10-19 | Japan Synthetic Rubber Co Ltd | プラズマ連続処理装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010077452A (ja) * | 2007-10-04 | 2010-04-08 | Canon Anelva Corp | 高周波スパッタリング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0623568Y2 (ja) | 1994-06-22 |
