JPS63131152U - - Google Patents

Info

Publication number

JPS63131152U

JPS63131152U JP2316587U JP2316587U JPS63131152U JP S63131152 U JPS63131152 U JP S63131152U JP 2316587 U JP2316587 U JP 2316587U JP 2316587 U JP2316587 U JP 2316587U JP S63131152 U JPS63131152 U JP S63131152U

Authority

JP

Japan

Prior art keywords

element isolation

isolation region

diffusion layer

type diffusion

region

Prior art date

1987-02-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 238000002955 isolation Methods 0.000 claims description 5
• 238000009792 diffusion process Methods 0.000 claims description 4
• 239000004065 semiconductor Substances 0.000 claims description 3
• 239000010410 layer Substances 0.000 description 5
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
• 238000000605 extraction Methods 0.000 description 1
• 239000011229 interlayer Substances 0.000 description 1
• 229910052710 silicon Inorganic materials 0.000 description 1
• 239000010703 silicon Substances 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1

Cited By (1)