JPS63129807U - - Google Patents
Info
- Publication number
- JPS63129807U JPS63129807U JP2395887U JP2395887U JPS63129807U JP S63129807 U JPS63129807 U JP S63129807U JP 2395887 U JP2395887 U JP 2395887U JP 2395887 U JP2395887 U JP 2395887U JP S63129807 U JPS63129807 U JP S63129807U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- light
- receiving surface
- photodetector
- difference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2395887U JPS63129807U (me) | 1987-02-19 | 1987-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2395887U JPS63129807U (me) | 1987-02-19 | 1987-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63129807U true JPS63129807U (me) | 1988-08-24 |
Family
ID=30822748
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2395887U Pending JPS63129807U (me) | 1987-02-19 | 1987-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63129807U (me) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56168104A (en) * | 1980-05-28 | 1981-12-24 | Rikagaku Kenkyusho | Detector for mark position |
| JPS58148904A (ja) * | 1982-02-27 | 1983-09-05 | Matsushita Electric Works Ltd | 寸法計測装置 |
-
1987
- 1987-02-19 JP JP2395887U patent/JPS63129807U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56168104A (en) * | 1980-05-28 | 1981-12-24 | Rikagaku Kenkyusho | Detector for mark position |
| JPS58148904A (ja) * | 1982-02-27 | 1983-09-05 | Matsushita Electric Works Ltd | 寸法計測装置 |