JPS63129807U

JPS63129807U -

Info

Publication number: JPS63129807U
Application number: JP2395887U
Authority: JP
Priority date: 1987-02-19
Filing date: 1987-02-19
Publication date: 1988-08-24

Description

[Brief explanation of the drawing]

図面は本考案の一実施例を示すものであり、第
１図ａは本実施例の概要を説明する正面図、第１
図ｂは側面図、第２図ａは光検知体部分を示す正
面図、第２図ｂは光検知体部分を示す側面図、第
２図ｃは受光面の状態を示す正面図、第２図ｄは
光学体による反射ビームの径の変化を示す斜視図
、第３図ａは基板上の物体への光ビーム照射状態
を示す側面図、第３図ｂは物体への光ビーム照射
状態を示す正面図、第４図は物体により形成され
る影の状態を示す平面図、第５図ａ、第５図ｂは
光ビームの特性の違いを説明するための図である
。２……光ビーム、６……基板、９……物体、１
０……反射ビーム、１１……光検知体、１２ａ…
…受光面、１３……反射部、ａ……走査方向。 The drawings show one embodiment of the present invention, and FIG.
Figure 2b is a side view, Figure 2a is a front view showing the photodetector part, Figure 2b is a side view showing the photodetector part, Figure 2c is a front view showing the state of the light receiving surface, and Figure 2c is a front view showing the state of the light receiving surface. Figure d is a perspective view showing the change in diameter of the reflected beam due to the optical body, Figure 3a is a side view showing the state of light beam irradiation to an object on the substrate, and Figure 3b is a view showing the state of light beam irradiation to the object. FIG. 4 is a plan view showing the state of the shadow formed by the object, and FIGS. 5a and 5b are diagrams for explaining the difference in the characteristics of the light beam. 2...Light beam, 6...Substrate, 9...Object, 1
0... Reflected beam, 11... Photodetector, 12a...
... Light receiving surface, 13 ... Reflection section, a ... Scanning direction.

Claims

[Scope of utility model registration request]

A light beam is scanned over a substrate, and the reflected beam after scanning the substrate is made incident on a photodetector having a plurality of light-receiving surfaces to determine the height of the object placed on the substrate and the substrate. In an optical position detection device that detects the presence or absence of an object with respect to a predetermined position by detecting a difference in the amount of light received by a photodetector caused by a difference in An optical position detecting device characterized in that reflecting portions are provided at both ends of the light receiving surface in the scanning direction to reflect the reflected beam toward the light receiving surface.