JPS63129806U - - Google Patents
Info
- Publication number
- JPS63129806U JPS63129806U JP2395787U JP2395787U JPS63129806U JP S63129806 U JPS63129806 U JP S63129806U JP 2395787 U JP2395787 U JP 2395787U JP 2395787 U JP2395787 U JP 2395787U JP S63129806 U JPS63129806 U JP S63129806U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- light
- difference
- photodetector
- reflected beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2395787U JPS63129806U (un) | 1987-02-19 | 1987-02-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2395787U JPS63129806U (un) | 1987-02-19 | 1987-02-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63129806U true JPS63129806U (un) | 1988-08-24 |
Family
ID=30822746
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2395787U Pending JPS63129806U (un) | 1987-02-19 | 1987-02-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63129806U (un) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53143257A (en) * | 1977-03-10 | 1978-12-13 | Centre Rech Metallurgique | Dimension measuring method |
| JPS58148904A (ja) * | 1982-02-27 | 1983-09-05 | Matsushita Electric Works Ltd | 寸法計測装置 |
-
1987
- 1987-02-19 JP JP2395787U patent/JPS63129806U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53143257A (en) * | 1977-03-10 | 1978-12-13 | Centre Rech Metallurgique | Dimension measuring method |
| JPS58148904A (ja) * | 1982-02-27 | 1983-09-05 | Matsushita Electric Works Ltd | 寸法計測装置 |