JPS6446702U - - Google Patents
Info
- Publication number
- JPS6446702U JPS6446702U JP14201087U JP14201087U JPS6446702U JP S6446702 U JPS6446702 U JP S6446702U JP 14201087 U JP14201087 U JP 14201087U JP 14201087 U JP14201087 U JP 14201087U JP S6446702 U JPS6446702 U JP S6446702U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- photodetector
- reflected beam
- receiving surface
- light receiving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14201087U JPS6446702U (un) | 1987-09-17 | 1987-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14201087U JPS6446702U (un) | 1987-09-17 | 1987-09-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6446702U true JPS6446702U (un) | 1989-03-22 |
Family
ID=31407582
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14201087U Pending JPS6446702U (un) | 1987-09-17 | 1987-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6446702U (un) |
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1987
- 1987-09-17 JP JP14201087U patent/JPS6446702U/ja active Pending