JPS6312836U - - Google Patents
Info
- Publication number
- JPS6312836U JPS6312836U JP10642086U JP10642086U JPS6312836U JP S6312836 U JPS6312836 U JP S6312836U JP 10642086 U JP10642086 U JP 10642086U JP 10642086 U JP10642086 U JP 10642086U JP S6312836 U JPS6312836 U JP S6312836U
- Authority
- JP
- Japan
- Prior art keywords
- tape
- pellet
- stage
- needle
- adsorbing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000008188 pellet Substances 0.000 claims description 8
- 239000011148 porous material Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10642086U JPS6312836U (US07714131-20100511-C00038.png) | 1986-07-11 | 1986-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10642086U JPS6312836U (US07714131-20100511-C00038.png) | 1986-07-11 | 1986-07-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6312836U true JPS6312836U (US07714131-20100511-C00038.png) | 1988-01-27 |
Family
ID=30981761
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10642086U Pending JPS6312836U (US07714131-20100511-C00038.png) | 1986-07-11 | 1986-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6312836U (US07714131-20100511-C00038.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015053419A (ja) * | 2013-09-09 | 2015-03-19 | 株式会社東芝 | 半導体装置の製造方法及び半導体製造装置 |
-
1986
- 1986-07-11 JP JP10642086U patent/JPS6312836U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015053419A (ja) * | 2013-09-09 | 2015-03-19 | 株式会社東芝 | 半導体装置の製造方法及び半導体製造装置 |
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