JPS63128255A - Excitation type thin film pickup coil - Google Patents
Excitation type thin film pickup coilInfo
- Publication number
- JPS63128255A JPS63128255A JP27489786A JP27489786A JPS63128255A JP S63128255 A JPS63128255 A JP S63128255A JP 27489786 A JP27489786 A JP 27489786A JP 27489786 A JP27489786 A JP 27489786A JP S63128255 A JPS63128255 A JP S63128255A
- Authority
- JP
- Japan
- Prior art keywords
- coil
- thin film
- type thin
- excitation
- center point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 42
- 230000005284 excitation Effects 0.000 title claims abstract description 33
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 238000004804 winding Methods 0.000 claims abstract 3
- 230000004907 flux Effects 0.000 abstract description 9
- 230000003068 static effect Effects 0.000 abstract description 6
- 229910052734 helium Inorganic materials 0.000 abstract description 5
- 239000001307 helium Substances 0.000 abstract description 5
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract description 5
- 239000007788 liquid Substances 0.000 abstract description 5
- 230000002093 peripheral effect Effects 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 description 4
- 241000894006 Bacteria Species 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 241000238366 Cephalopoda Species 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Measuring Magnetic Variables (AREA)
- Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は、例えば磁気微粉子とか走磁性細菌の如き磁性
信号源となり得る測定対象物に対して、静磁場または交
番磁場を付与しているとき、あるいは当該磁場を消磁さ
せたときにあって、当該対象物の磁気的な静特性や動特
性を検出するためなどに用いて好適な励磁型薄膜ピック
アップコイルに関する。Detailed Description of the Invention (Field of Industrial Application) The present invention applies a static magnetic field or an alternating magnetic field to an object to be measured that can be a magnetic signal source, such as magnetic fine particles or magnetotactic bacteria. The present invention relates to an excitation type thin film pickup coil suitable for use in detecting magnetic static characteristics or dynamic characteristics of an object when the magnetic field is demagnetized or when the magnetic field is demagnetized.
（従来の技術）
従来上記のような測定対象物に対する磁気特性の測定は
行なわれていないが、当該測定の近似分野として、磁場
を付与した状態下における磁化率の測定が実施されてい
る。(Prior Art) Although the magnetic properties of the object to be measured as described above have not been measured in the past, as an approximation to this measurement, the measurement of magnetic susceptibility under a state in which a magnetic field is applied has been carried out.
ところが、このため用いられるものは、磁場を付与して
やるための励磁コイルがボビンに巻装されていると共に
、これとは全く別体にピックアップコイルを用意し、当
該内コイルを出来るだけ同軸配置となるよう構成したも
のであるから、ボビンに巻かれた励磁コイルが不揃いと
なること等によって、発生磁場の磁束密度に歪が生じて
しまう上に、双方の軸心を合致させることが極めて困難
となり、微分型のピックアップコイルを用いても、励磁
コイルによる磁場によって生ずるピックアップコイルの
誘起電力を消去してしまうことができないと共に、外部
からもノイズを拾ってしまうこととなり、この結果精度
の高い磁気的な検出、測定ができず、特に微細な磁気的
変化を検出しなければならないような前記の走磁性細菌
などの測定対象物について、満足すべき測定結果を得る
ことは難事であった。However, in the devices used for this purpose, an excitation coil for applying a magnetic field is wound around a bobbin, a pickup coil is prepared completely separately from this, and the inner coil is arranged as coaxially as possible. Because of this structure, the excitation coils wound around the bobbin are not aligned, which causes distortion in the magnetic flux density of the generated magnetic field, and it is extremely difficult to align both axes. Even if a differential type pickup coil is used, it is not possible to eliminate the induced power in the pickup coil caused by the magnetic field generated by the excitation coil, and it also picks up noise from the outside.As a result, highly accurate magnetic It has been difficult to obtain satisfactory measurement results for objects to be measured, such as the above-mentioned magnetotactic bacteria, which cannot be detected or measured, and in which minute magnetic changes must be detected.
（発明が解決しようとする問題点）
本発明は上記従来の問題点に鑑み、一枚の電気絶縁基板
上の適所に夫々所定の相対関係をもった励磁用薄膜コイ
ルと、微分型薄膜ピックアップコイルとを形成してやる
ことによって、面倒な両コイルの軸合せ操作を行なう必
要なしに、高い精度を確保可能となし、これによって、
従来全〈実施されていなかった磁気物質の磁気的な静的
および動的特性を、印加される磁場から、ノイズを拾う
ことなしに検知し得るようにしたのが、その目的である
。(Problems to be Solved by the Invention) In view of the above-mentioned conventional problems, the present invention provides an excitation thin film coil and a differential type thin film pickup coil, each having a predetermined relative relationship at a proper location on a single electrically insulating substrate. By forming a
The purpose is to make it possible to detect the static and dynamic magnetic properties of magnetic materials from an applied magnetic field without picking up noise, which has not been done in the past.
（問題点を解決するための手段）
本発明は上記の目的を達成するために、電気絶縁基板の
一面上にあって、その外周縁寄りには、所定中心点を中
心として一対の端子をもったスパイラル状の励磁用薄膜
コイルを形成すると共に、当該励磁用薄膜コイルの内側
には、上記中心点に対して点対称となるように、一対の
端子をもった一次以上の微分型薄膜ピックアップコイル
が形成されていることを特徴とする励磁型薄膜ピックア
ップコイルを提供しようとするものである。(Means for Solving the Problems) In order to achieve the above-mentioned object, the present invention has a pair of terminals on one surface of an electrically insulating substrate near a predetermined center point near the outer periphery thereof. A spiral excitation thin film coil is formed, and inside the excitation thin film coil there is a primary or higher order differential type thin film pickup coil having a pair of terminals symmetrically with respect to the center point. It is an object of the present invention to provide an excitation type thin film pickup coil characterized in that the following is formed.
（実 施 例）
本発明を図示の実施例によって詳記すれば、第１図に示
す通り円板状等所定形状とした電気絶縁基板ｌは、ガラ
ス、エポキシ樹脂等によって形成され、その−面ｌａ上
にあって、外周縁ｌｂ寄りには、所定の中心点０を中心
とした図示例では円形状にて同心円とした所要数条のコ
イル２ａ、２ｂを段差連結部２ｃにより連続させてあり
、かつ、一対の端子２ｄ、２ｄ’を上記段差連結部２Ｃ
近傍にて具備させたスパイラル状の励磁用薄膜コイル２
が形成されている。(Embodiment) To describe the present invention in detail with reference to the illustrated embodiment, as shown in FIG. On the outer circumferential edge lb of the coil 2a, a required number of coils 2a and 2b, which are circular and concentric in the illustrated example, centered on a predetermined center point 0, are connected by a step connecting portion 2c. , and the pair of terminals 2d and 2d' are connected to the step connection portion 2C.
Spiral excitation thin film coil 2 provided nearby
is formed.
ここで上記励磁用薄膜コイル２の形成は、写真製版技術
によって形成すればよい。Here, the excitation thin film coil 2 may be formed by photolithography.
次に、上記の中心点０に対して点対称となるように、し
かも上記の励磁用薄膜コイル２の内側にあって、電気絶
縁基板１の一面ｌａ上に一次以上の微分型薄膜ピックア
ップコイル３を、これまたフォトリソグラフィー等の従
来技術手段によって形成するのであり、上記の通り点対
称とすることの一例として図示されているものは、一方
の端子３ａを具備した順巻きコイル３ｂと、当該順巻き
コイル３ｂと連続して、終端に他方の端子３ｃを備えて
いる逆巻きコイル３ｄとからなっている。Next, a differential type thin film pickup coil 3 of primary or higher order is placed on one surface la of the electrically insulating substrate 1 so as to be symmetrical with respect to the center point 0, and also inside the excitation thin film coil 2. are also formed by conventional techniques such as photolithography, and the one illustrated as an example of point symmetry as described above is a sequentially wound coil 3b having one terminal 3a and a sequentially wound coil 3b provided with one terminal 3a, It consists of a reversely wound coil 3d which is continuous with the wound coil 3b and has the other terminal 3c at its end.
そこで、これを用いるには上記の励磁型薄膜ピックアッ
プコイルにより、極めて微弱な磁気的変化を検出するの
であるから、これを超電導状態下に置くのである。Therefore, in order to use this, the excitation type thin film pickup coil described above is used to detect extremely weak magnetic changes, so it is placed in a superconducting state.
このため、第２図のように磁場の影響を受けることのな
い材質例えばＦＲＰなどによる液体ヘリウムデユワ−４
を用意し、当該デユワ−４内の底部４ａに、電気絶縁基
板１を載置し、表出された励磁用薄膜コイル２および微
分型薄膜ピックアップコイル３を、同上デユワ−４内の
液体ヘリウムによって超電導状態とするのであり、同図
中４ｂは内壁４ｃと外壁４ｄ間に形成された真空断熱層
を示す。For this reason, as shown in Figure 2, liquid helium dewar 4 is made of a material that is not affected by magnetic fields, such as FRP.
An electrically insulating substrate 1 is placed on the bottom 4a of the dewar 4, and the exposed excitation thin film coil 2 and differential thin film pickup coil 3 are heated with liquid helium in the dewar 4. A superconducting state is established, and 4b in the figure indicates a vacuum heat insulating layer formed between the inner wall 4c and the outer wall 4d.
そこで、測定対象物は第２図（ａ）に明示の如く、上記
液体ヘリウムデユワ−４の底部４ａ直下近傍に配置して
おき、励磁用薄膜コイル２の端子２ｄ、２ｄ’には、図
示されていない電源装置を接続すると共に、微分型薄膜
ピックアップコイル３の端子３ａ、３ｃには、測定対象
物Ａの磁気的変化によって、当該ピックアップコイル３
に発生する微弱電流が流入する図示しないインプットコ
イル、スクイド等を具備した所要測定回路装置を接続し
ておくのである。Therefore, as clearly shown in FIG. 2(a), the object to be measured is placed near the bottom 4a of the liquid helium dewar 4, and the terminals 2d, 2d' of the excitation thin film coil 2 are At the same time, the terminals 3a and 3c of the differential thin film pickup coil 3 are connected to
A required measuring circuit device including an input coil (not shown), SQUID, etc., into which the weak current generated in the circuit flows is connected.
ここで上記の如くスパイラル状に形成した励磁用薄膜コ
イル２に電源装置から電流を供給した場合、これにより
励起される磁場は第２図（ｂ）の通り当該コイル２の径
方向位置に対して一定の磁束密度が得られるものでなく
、中心点０で最小値となり、外周寄りの位置Ｍ、Ｍ’に
て最大値となる高次曲線をなし、さらにこの際、同上コ
イル２に流れる電流の強さによって、同図による磁束密
度分布曲線の勾配が変化する。Here, when a current is supplied from the power supply to the excitation thin film coil 2 formed in a spiral shape as described above, the magnetic field excited by this is relative to the radial position of the coil 2 as shown in Fig. 2(b). It is not possible to obtain a constant magnetic flux density, but it forms a high-order curve with the minimum value at the center point 0 and the maximum value at positions M and M' near the outer periphery. The slope of the magnetic flux density distribution curve shown in the figure changes depending on the strength.
しかし、本発明では微分型薄膜ピックアップコイル３が
、中心点０にて励磁用薄膜コイル２と同軸であり、例示
した順巻きコイル３ｂおよび逆巻きコイル３ｄには、夫
々全く同じ量の磁束が入力されることとなり、従って励
磁用薄膜コイル２による磁場の影響が消去され、ノイズ
を生じないこととなる。However, in the present invention, the differential type thin-film pickup coil 3 is coaxial with the excitation thin-film coil 2 at the center point 0, and exactly the same amount of magnetic flux is input to the illustrated forward-wound coil 3b and reverse-wound coil 3d, respectively. Therefore, the influence of the magnetic field due to the excitation thin film coil 2 is eliminated, and no noise is generated.
従って測定対象物Ａを、特に順巻きコイル３ｂまたは逆
巻きコイル３ｄの中心線Ｂ位置に配するようにすれば、
極めて精度の高い測定が可能となる。Therefore, if the object to be measured A is placed particularly at the center line B of the forward-wound coil 3b or the reverse-wound coil 3d,
Extremely accurate measurements are possible.
尚、ここで上記励磁用薄膜コイル２による磁場以外に、
ノイズ源としての外部磁束が存在する際には、当該ノイ
ズ源の特性、方位に合せて二次微分型等外部磁束を消去
し得るコイルを形成することとなる。Here, in addition to the magnetic field generated by the excitation thin film coil 2,
When external magnetic flux exists as a noise source, a coil capable of erasing the external magnetic flux, such as a second-order differential type, is formed in accordance with the characteristics and orientation of the noise source.
（発明の効果）
本発明は以上のようにして構成されており、励磁用コイ
ルとピックアップコイルを格別に製作し、これらを組合
せたものに比し、励磁用薄膜コイル２と微分型薄膜ピッ
クアップコイル３とが労せずして、その中心点０が完全
に合致し、しかも当該両コイル２，３が互いに平行状態
に確保され、これにより点対称となるよう形成された順
巻き、逆巻きコイルに付与される磁束量が等しくなって
ノイズが消去されるから、励磁用薄膜コイル２が作る静
磁場あるいは交番磁場を、微分型薄膜ピックアップコイ
ル３が検出してしまうことなく、測定対象物の磁気的静
特性および動特性を高い精度で測知することができる。(Effects of the Invention) The present invention is constructed as described above, and the excitation thin film coil 2 and the differential thin film pickup coil are different from those in which the excitation coil and the pickup coil are specially manufactured and are combined. 3 and 3, their center points 0 perfectly coincide with each other, and both coils 2 and 3 are ensured to be parallel to each other, thereby imparting to the forward-wound and reverse-wound coils formed so as to be point symmetrical. Since the amount of magnetic flux generated becomes equal and noise is eliminated, the differential thin film pickup coil 3 does not detect the static magnetic field or alternating magnetic field generated by the excitation thin film coil 2, and the magnetic static Characteristics and dynamic characteristics can be measured with high accuracy.
第１図は本発明に係る励磁型薄膜ピックアップコイルの
平面図、第２図（ａ）は同コイルの使用状態を示す縦断
正面図、同図（ｂ）は当該コイルの励磁により生ずる磁
場の磁束密度分布曲線図表である。
１・・・・・・電気絶縁基板
ｌａ・・・・・・電気絶縁基板の一面
！ｂ・・・・・・電気絶縁基板の外周縁２・・・・・・
励磁用薄膜コイル
２ｄ、２ｄ’・・・・・・励磁用薄膜コイルの端子３・
・・・・・微分型薄膜ピックアップコイル３ａ、３ｃ・
・微分型薄膜ピックアップコイルの端子３ｂ・・・・・
・順巻きコイル
３ｄ・・・・・・逆巻きコイル
０・・・・・・中心点
代理人 弁理士 斎 藤 義 雄
図面の浄書（内容に変更なし）
第１日
第２０
（α）
手続補正盲動式）
％式％
２ 発明の名称 励磁型薄膜ピックアップコイル
３ 補正をする者
事件との関係 特許出願人
株式会社はくさん
４代理人〒１００
東京都千代田区有楽町１丁目６番６号小谷ビル５ 補正
命令の日付 昭和６２年 １月２７日別紙の通り浄書
図面（内容に変更なし）を提出します。Fig. 1 is a plan view of an excitation type thin film pickup coil according to the present invention, Fig. 2 (a) is a vertical cross-sectional front view showing the state in which the coil is used, and Fig. 2 (b) is a magnetic flux of a magnetic field generated by excitation of the coil. This is a density distribution curve chart. 1... Electrical insulating board la... One side of the electrically insulating board! b...Outer peripheral edge 2 of electrically insulating board...
Thin film coil for excitation 2d, 2d'...Terminal 3 of the thin film coil for excitation
...Differential thin film pickup coils 3a, 3c.
・Terminal 3b of differential type thin film pickup coil...
・Forward-wound coil 3d...Reverse-wound coil 0...Center point agent Patent attorney Yoshio Saito Engraving of the drawing (no change in content) Day 1, No. 20 (α) Procedural amendment blind motion Formula) % Formula % 2 Title of the invention Excitation type thin film pickup coil 3 Relationship with the person making the amendment Patent applicant Hakusan Co., Ltd. 4 Agent Address: 5 Kotari Building, 1-6-6 Yurakucho, Chiyoda-ku, Tokyo 100 Japan Amendment Date of Order: January 27, 1986 I will submit the engraving drawings (no changes in content) as shown in the attached sheet.
Claims (2)
には、所定中心点を中心として一対の端子をもったスパ
イラル状の励磁用薄膜コイルを形成すると共に、当該励
磁用薄膜コイルの内側には、上記中心点に対して点対称
となるように、一対の端子をもった一次以上の微分型薄
膜ピックアップコイルが形成されていることを特徴とす
る励磁型薄膜ピックアップコイル。(1) A spiral excitation thin film coil having a pair of terminals centered on a predetermined center point is formed on one surface of the electrically insulating substrate near its outer periphery, and the excitation thin film coil is An excitation type thin film pickup coil characterized in that a differential type thin film pickup coil of the first or higher order having a pair of terminals is formed inside so as to be point symmetrical with respect to the above-mentioned center point.
互いに逆巻きにて円弧状に形成されている特許請求の範
囲第１項記載の励磁型薄膜ピックアップコイル。(2) The excitation type thin film pickup coil according to claim 1, wherein the first order differential type thin film coils are formed in an arc shape by winding in opposite directions to each other on the left and right sides of a center point.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61274897A JPH0648261B2 (en) | 1986-11-18 | 1986-11-18 | Excitation type thin film pickup coil |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61274897A JPH0648261B2 (en) | 1986-11-18 | 1986-11-18 | Excitation type thin film pickup coil |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63128255A true JPS63128255A (en) | 1988-05-31 |
| JPH0648261B2 JPH0648261B2 (en) | 1994-06-22 |
Family
ID=17548047
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61274897A Expired - Fee Related JPH0648261B2 (en) | 1986-11-18 | 1986-11-18 | Excitation type thin film pickup coil |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648261B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07234205A (en) * | 1993-07-12 | 1995-09-05 | Sumitomo Electric Ind Ltd | Nondestructive inspection device |
| JPH09145677A (en) * | 1995-11-17 | 1997-06-06 | Shimizu Corp | Method for judging plasticization of steel |
| JPH09243606A (en) * | 1996-03-08 | 1997-09-19 | Kawasaki Heavy Ind Ltd | Probe device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5969885A (en) * | 1982-10-13 | 1984-04-20 | 神鋼電機株式会社 | Coin discriminator |
| JPS60142246A (en) * | 1983-12-12 | 1985-07-27 | ゼネラル・エレクトリツク・カンパニイ | Device and method of detecting defect in surface region and region under surface of semi-conductive material or conductive material |
-
1986
- 1986-11-18 JP JP61274897A patent/JPH0648261B2/en not_active Expired - Fee Related
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5969885A (en) * | 1982-10-13 | 1984-04-20 | 神鋼電機株式会社 | Coin discriminator |
| JPS60142246A (en) * | 1983-12-12 | 1985-07-27 | ゼネラル・エレクトリツク・カンパニイ | Device and method of detecting defect in surface region and region under surface of semi-conductive material or conductive material |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07234205A (en) * | 1993-07-12 | 1995-09-05 | Sumitomo Electric Ind Ltd | Nondestructive inspection device |
| JPH09145677A (en) * | 1995-11-17 | 1997-06-06 | Shimizu Corp | Method for judging plasticization of steel |
| JPH09243606A (en) * | 1996-03-08 | 1997-09-19 | Kawasaki Heavy Ind Ltd | Probe device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648261B2 (en) | 1994-06-22 |
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