JPS6312757U - - Google Patents
Info
- Publication number
- JPS6312757U JPS6312757U JP10620786U JP10620786U JPS6312757U JP S6312757 U JPS6312757 U JP S6312757U JP 10620786 U JP10620786 U JP 10620786U JP 10620786 U JP10620786 U JP 10620786U JP S6312757 U JPS6312757 U JP S6312757U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- gas detection
- gas
- utility
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 7
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 239000010419 fine particle Substances 0.000 claims 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 claims 1
- 229910001887 tin oxide Inorganic materials 0.000 claims 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10620786U JPS6312757U (forum.php) | 1986-07-10 | 1986-07-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10620786U JPS6312757U (forum.php) | 1986-07-10 | 1986-07-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6312757U true JPS6312757U (forum.php) | 1988-01-27 |
Family
ID=30981350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10620786U Pending JPS6312757U (forum.php) | 1986-07-10 | 1986-07-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6312757U (forum.php) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03130654A (ja) * | 1989-10-14 | 1991-06-04 | Fuji Electric Co Ltd | ガスセンサ |
| WO1993016377A1 (en) * | 1992-02-14 | 1993-08-19 | Seiko Epson Corporation | Humidity sensor and its manufacture |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5199097A (ja) * | 1975-02-26 | 1976-09-01 | Kyoto Ceramic | Gasukenchisoshi |
| JPS5246889A (en) * | 1975-10-11 | 1977-04-14 | Hitachi Ltd | Solid electrolyte oxygen detector |
| JPS5549706A (en) * | 1978-10-02 | 1980-04-10 | Omron Tateisi Electronics Co | Pi or pid regulator |
-
1986
- 1986-07-10 JP JP10620786U patent/JPS6312757U/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5199097A (ja) * | 1975-02-26 | 1976-09-01 | Kyoto Ceramic | Gasukenchisoshi |
| JPS5246889A (en) * | 1975-10-11 | 1977-04-14 | Hitachi Ltd | Solid electrolyte oxygen detector |
| JPS5549706A (en) * | 1978-10-02 | 1980-04-10 | Omron Tateisi Electronics Co | Pi or pid regulator |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03130654A (ja) * | 1989-10-14 | 1991-06-04 | Fuji Electric Co Ltd | ガスセンサ |
| WO1993016377A1 (en) * | 1992-02-14 | 1993-08-19 | Seiko Epson Corporation | Humidity sensor and its manufacture |