JPS63127134U - - Google Patents
Info
- Publication number
- JPS63127134U JPS63127134U JP1969187U JP1969187U JPS63127134U JP S63127134 U JPS63127134 U JP S63127134U JP 1969187 U JP1969187 U JP 1969187U JP 1969187 U JP1969187 U JP 1969187U JP S63127134 U JPS63127134 U JP S63127134U
- Authority
- JP
- Japan
- Prior art keywords
- wafers
- wafer
- storage case
- lowered
- wafer storage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 3
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1969187U JPS63127134U (ko) | 1987-02-12 | 1987-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1969187U JPS63127134U (ko) | 1987-02-12 | 1987-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63127134U true JPS63127134U (ko) | 1988-08-19 |
Family
ID=30814517
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1969187U Pending JPS63127134U (ko) | 1987-02-12 | 1987-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63127134U (ko) |
-
1987
- 1987-02-12 JP JP1969187U patent/JPS63127134U/ja active Pending