JPS62112146U - - Google Patents
Info
- Publication number
- JPS62112146U JPS62112146U JP45686U JP45686U JPS62112146U JP S62112146 U JPS62112146 U JP S62112146U JP 45686 U JP45686 U JP 45686U JP 45686 U JP45686 U JP 45686U JP S62112146 U JPS62112146 U JP S62112146U
- Authority
- JP
- Japan
- Prior art keywords
- storage box
- wafer storage
- ventilation
- lid
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009423 ventilation Methods 0.000 claims description 6
- 238000012856 packing Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 5
- 239000002274 desiccant Substances 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45686U JPS62112146U (ko) | 1986-01-07 | 1986-01-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP45686U JPS62112146U (ko) | 1986-01-07 | 1986-01-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62112146U true JPS62112146U (ko) | 1987-07-17 |
Family
ID=30777445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP45686U Pending JPS62112146U (ko) | 1986-01-07 | 1986-01-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62112146U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09134952A (ja) * | 1995-11-03 | 1997-05-20 | Jenoptik Ag | ウェハ状物体の搬送コンテナ |
-
1986
- 1986-01-07 JP JP45686U patent/JPS62112146U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09134952A (ja) * | 1995-11-03 | 1997-05-20 | Jenoptik Ag | ウェハ状物体の搬送コンテナ |