JPS63127126U - - Google Patents
Info
- Publication number
- JPS63127126U JPS63127126U JP1931987U JP1931987U JPS63127126U JP S63127126 U JPS63127126 U JP S63127126U JP 1931987 U JP1931987 U JP 1931987U JP 1931987 U JP1931987 U JP 1931987U JP S63127126 U JPS63127126 U JP S63127126U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- center
- semiconductor wafer
- overflow groove
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 12
- 238000001035 drying Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 230000000903 blocking effect Effects 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1931987U JPS63127126U (zh) | 1987-02-12 | 1987-02-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1931987U JPS63127126U (zh) | 1987-02-12 | 1987-02-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63127126U true JPS63127126U (zh) | 1988-08-19 |
Family
ID=30813814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1931987U Pending JPS63127126U (zh) | 1987-02-12 | 1987-02-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63127126U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012119603A (ja) * | 2010-12-03 | 2012-06-21 | Japan Display Central Co Ltd | 基板処理装置 |
-
1987
- 1987-02-12 JP JP1931987U patent/JPS63127126U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012119603A (ja) * | 2010-12-03 | 2012-06-21 | Japan Display Central Co Ltd | 基板処理装置 |