JPS63127122U - - Google Patents
Info
- Publication number
- JPS63127122U JPS63127122U JP18219386U JP18219386U JPS63127122U JP S63127122 U JPS63127122 U JP S63127122U JP 18219386 U JP18219386 U JP 18219386U JP 18219386 U JP18219386 U JP 18219386U JP S63127122 U JPS63127122 U JP S63127122U
- Authority
- JP
- Japan
- Prior art keywords
- furnace tube
- heat treatment
- semiconductor wafer
- wafer jig
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18219386U JPS63127122U (enExample) | 1986-11-27 | 1986-11-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18219386U JPS63127122U (enExample) | 1986-11-27 | 1986-11-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63127122U true JPS63127122U (enExample) | 1988-08-19 |
Family
ID=31127762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18219386U Pending JPS63127122U (enExample) | 1986-11-27 | 1986-11-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63127122U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61114522A (ja) * | 1984-11-09 | 1986-06-02 | Hitachi Ltd | 半導体ウエハ加熱装置 |
| JPS61161711A (ja) * | 1985-01-11 | 1986-07-22 | Denkoo:Kk | 半導体の熱処理方法及び熱処理装置 |
-
1986
- 1986-11-27 JP JP18219386U patent/JPS63127122U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61114522A (ja) * | 1984-11-09 | 1986-06-02 | Hitachi Ltd | 半導体ウエハ加熱装置 |
| JPS61161711A (ja) * | 1985-01-11 | 1986-07-22 | Denkoo:Kk | 半導体の熱処理方法及び熱処理装置 |