JPS63127061U - - Google Patents
Info
- Publication number
- JPS63127061U JPS63127061U JP1827587U JP1827587U JPS63127061U JP S63127061 U JPS63127061 U JP S63127061U JP 1827587 U JP1827587 U JP 1827587U JP 1827587 U JP1827587 U JP 1827587U JP S63127061 U JPS63127061 U JP S63127061U
- Authority
- JP
- Japan
- Prior art keywords
- accelerating electrode
- electrode
- exhaust port
- extraction
- emitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000605 extraction Methods 0.000 claims description 7
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 108010083687 Ion Pumps Proteins 0.000 claims description 2
- 230000001133 acceleration Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1827587U JPS63127061U (fr) | 1987-02-10 | 1987-02-10 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1827587U JPS63127061U (fr) | 1987-02-10 | 1987-02-10 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63127061U true JPS63127061U (fr) | 1988-08-19 |
Family
ID=30811802
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1827587U Pending JPS63127061U (fr) | 1987-02-10 | 1987-02-10 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63127061U (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003257330A (ja) * | 2002-03-06 | 2003-09-12 | Jeol Ltd | 集束イオンビーム装置 |
-
1987
- 1987-02-10 JP JP1827587U patent/JPS63127061U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2003257330A (ja) * | 2002-03-06 | 2003-09-12 | Jeol Ltd | 集束イオンビーム装置 |