JPS63125866A - Magnetic fluid seal coupler - Google Patents
Magnetic fluid seal couplerInfo
- Publication number
- JPS63125866A JPS63125866A JP61271307A JP27130786A JPS63125866A JP S63125866 A JPS63125866 A JP S63125866A JP 61271307 A JP61271307 A JP 61271307A JP 27130786 A JP27130786 A JP 27130786A JP S63125866 A JPS63125866 A JP S63125866A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic fluid
- gas
- fluid seal
- seal
- reservoir space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011553 magnetic fluid Substances 0.000 title claims abstract description 74
- 238000007789 sealing Methods 0.000 claims abstract description 26
- 239000011554 ferrofluid Substances 0.000 claims description 3
- 229910052736 halogen Inorganic materials 0.000 abstract description 25
- 150000002367 halogens Chemical class 0.000 abstract description 25
- 230000000694 effects Effects 0.000 abstract description 16
- 230000006866 deterioration Effects 0.000 abstract description 12
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 235000006732 Torreya nucifera Nutrition 0.000 description 2
- 244000111306 Torreya nucifera Species 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000000779 depleting effect Effects 0.000 description 1
- 238000005538 encapsulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Sealing Of Bearings (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は磁性流体シールカップラーに関し、特にガス封
入装置の内部に装置外部から回転動力を伝達し、かつ装
置内部を外気から遮断する磁性流体シールカップラーに
関するものである。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a magnetic fluid seal coupler, and particularly to a magnetic fluid seal that transmits rotational power to the inside of a gas-filled device from the outside of the device and isolates the inside of the device from the outside air. It concerns couplers.
第５図は従来の磁性流体シールカープラーの一例を示す
一部断面を含む四面図である。同図において、磁性流体
シールカップラーは回転動力を伝達するシャフト１８と
、シャフト１８の直径より約１０’ＯＪｉｍ程度直径の
大きいシャフト１８が通る穴を持ち、かつシャフト１８
の長さ方向に並べられた複数個のポールピース１６と、
ポールピース１６を磁化する磁石１７と、ポールピース
１６とシャフト１８との間の磁性流体１５と、シャフト
１８を保持するベアリング１９およびケース２０から構
成されている。磁性流体シールカップラーにおける気密
保持はポールピース１６とシャツ１〜１８との間に生じ
ている磁場より保持されている磁性流体１５により行わ
れている。FIG. 5 is a four-sided view, including a partial cross section, showing an example of a conventional magnetic fluid seal coupler. In the figure, the magnetic fluid seal coupler has a shaft 18 for transmitting rotational power, and a hole through which the shaft 18 passes, the diameter of which is approximately 10'OJim larger than the diameter of the shaft 18.
a plurality of pole pieces 16 arranged in the length direction;
It consists of a magnet 17 that magnetizes the pole piece 16, a magnetic fluid 15 between the pole piece 16 and the shaft 18, a bearing 19 that holds the shaft 18, and a case 20. Airtightness in the magnetic fluid seal coupler is achieved by the magnetic fluid 15 held by the magnetic field generated between the pole piece 16 and the shirts 1 to 18.
し発明が解決しようとする問題点〕
上述した従来の磁性流体シールカップラーを希ガスハラ
イドエキシマレーザ装置などのように化学的に反応性の
高いハロゲンガスを含むガスを使用している装置に用い
るときは、磁性流体の溶液に弗素系の油を用いている。[Problems to be Solved by the Invention] When the above-described conventional magnetic fluid seal coupler is used in a device that uses a gas containing chemically highly reactive halogen gas, such as a rare gas halide excimer laser device, etc. uses fluorine-based oil in the magnetic fluid solution.
しかし、弗素系の油を用いてもハロゲンガスとは徐々に
反応し油が枯渇して、磁性流体のシール効果が劣化する
。このため、ハロゲンガスを含む高圧ガスが突発的に外
部に漏洩して作業環境を汚染し、さらには人体の安全に
も係わる問題があった。However, even if a fluorine-based oil is used, it will gradually react with the halogen gas, depleting the oil, and degrading the sealing effect of the magnetic fluid. For this reason, high-pressure gas containing halogen gas suddenly leaks to the outside, contaminating the working environment, and furthermore, there are problems related to human safety.
本発明の目的は、突発的なガス漏洩が起きる前に磁性流
体のシール効果の劣化が分かる磁性流体シールカップラ
ーを提供することにある。An object of the present invention is to provide a magnetic fluid seal coupler in which deterioration of the sealing effect of the magnetic fluid can be detected before sudden gas leakage occurs.
本発明の磁性流体シールカップラーは、その長手方向の
中間にシャフトが貫通しているガス溜め用空間と、この
ガス溜め用空間内のガスの封入。The magnetic fluid seal coupler of the present invention includes a gas reservoir space through which a shaft passes through the longitudinal center of the coupler, and a gas sealed in the gas reservoir space.
排気を行うガス導入出口と、前記ガス溜め用空間を挟ん
で前記ガス封入装置側およびその反対側にそれぞれ設け
られた第１および第２の磁性流体シール領域を備えてい
る。It includes a gas introduction outlet for evacuation, and first and second magnetic fluid seal areas provided on the gas filling device side and the opposite side, respectively, with the gas reservoir space in between.
し作用〕
本発明による磁性流体シールカップラーにおいては、長
手方向の中間にカス溜め用空間を設け、磁性流体シール
領域をガス溜め用空間を挟んでガス封入装置側の第１の
磁性流体シール領域とガス封入装置と反対側の第２の磁
性流体シール領域とに分けている。従って、第１の磁性
流体シール領域の磁性流体のシール効果がハロゲンガス
により劣化しても、第２の磁性流体シール領域の磁性流
体はハロゲンガスに触れていないためにシール効果は全
く劣化していないので、ガス封入装置からハロゲンガス
を含むガスが流れ出てもガスはガス溜め用空間に溜まる
。このため、ガス溜め用空間の圧力変化またはハロゲン
ガスの有無によって磁性流体のシール効果の劣化が分か
るので、ガス封入装置内部からのガスの突発的な漏洩を
防ぐことができる。[Operation] In the magnetic fluid seal coupler according to the present invention, a waste reservoir space is provided in the middle in the longitudinal direction, and the magnetic fluid seal region is connected to the first magnetic fluid seal region on the gas filling device side with the gas reservoir space in between. It is divided into a gas encapsulation device and an opposite second ferrofluid sealing region. Therefore, even if the sealing effect of the magnetic fluid in the first magnetic fluid sealing area is degraded by the halogen gas, the sealing effect will not deteriorate at all because the magnetic fluid in the second magnetic fluid sealing area is not in contact with the halogen gas. Therefore, even if gas containing halogen gas flows out from the gas filling device, the gas remains in the gas storage space. Therefore, the deterioration of the sealing effect of the magnetic fluid can be detected by the pressure change in the gas storage space or the presence or absence of halogen gas, so that sudden leakage of gas from inside the gas filling device can be prevented.
次に、本発明について第１図〜第４図を参照して詳細に
説明する。Next, the present invention will be explained in detail with reference to FIGS. 1 to 4.
第１図は本発明の磁性流体シールカップラーの一実施例
を示す一部断面を含む側面図、第２図。FIG. 1 is a side view, partially in section, showing an embodiment of the magnetic fluid seal coupler of the present invention, and FIG.
第３図、第４図はそれぞれ第１図に示した磁性流体シー
ルカップラーの第１．第２．第３．の使用例を示す装置
の側面図である。3 and 4 respectively show the first section of the magnetic fluid seal coupler shown in FIG. Second. Third. FIG. 3 is a side view of the device showing an example of its use.
第１図に示した実施例において、第５図に示した従来例
との間で異なる点は、ガス溜め用空間１を磁性流体シー
ルカップラーの長手方向の中間に設け、それを挟んで磁
性流体シール領域をガス封入装置側の第１の磁性流体シ
ール領域とその反対側の第２の磁性流体シール領域に分
け、さらにガス溜め用空間内のガスの封入、排気のため
のガス導入出口２を取り付けたことである。このような
構成にすることにより、化学的に反応性の高いハロゲン
ガスによる第１の磁性流体シール領域の磁性流体３のシ
ール効果が劣化して気密が保てなくなっても、第２の磁
性流体シール領域の磁性流体４のシール効果は全く劣化
していないので、第１の磁性流体シール領域を通り流れ
出るハロゲンガスを含むガスはガス溜め用空間１に溜ま
る。このため、ガス溜め用空間１内の圧力変化やガスの
存在を調べることにより磁性流体のシール効果の劣化が
分かる。The difference between the embodiment shown in FIG. 1 and the conventional example shown in FIG. 5 is that a gas reservoir space 1 is provided in the longitudinal middle of the magnetic fluid seal coupler, and the magnetic fluid The sealing area is divided into a first magnetic fluid sealing area on the side of the gas filling device and a second magnetic fluid sealing area on the opposite side, and further a gas introduction outlet 2 is provided for filling and exhausting gas in the gas reservoir space. I installed it. With such a configuration, even if the sealing effect of the magnetic fluid 3 in the first magnetic fluid sealing area deteriorates due to the chemically highly reactive halogen gas and airtightness cannot be maintained, the second magnetic fluid Since the sealing effect of the magnetic fluid 4 in the seal area has not deteriorated at all, the gas containing halogen gas flowing out through the first magnetic fluid seal area remains in the gas reservoir space 1. Therefore, deterioration of the sealing effect of the magnetic fluid can be detected by examining pressure changes and the presence of gas in the gas reservoir space 1.
次に、第２図に示した第１の使用例では、磁性流体シー
ルカップラー１０のガス導入出口１１にハロゲン検出器
１２を取り付けている。従って、第１の磁性流体シール
領域の磁性流体のハロゲンガスによる劣化でガス溜め用
空間に溜まったハロゲンガスを含むガスはガス導入出口
１１を通してハロゲンガス検出器１２に入るので、ハロ
ゲンガスを検知することにより磁性流体の劣化が分かる
。Next, in the first usage example shown in FIG. 2, a halogen detector 12 is attached to the gas introduction outlet 11 of the magnetic fluid seal coupler 10. Therefore, the gas containing halogen gas accumulated in the gas reservoir space due to deterioration of the magnetic fluid in the first magnetic fluid sealing area by the halogen gas enters the halogen gas detector 12 through the gas introduction outlet 11, so that the halogen gas is detected. This shows the deterioration of the magnetic fluid.
次に、第３図に示した第２の使用例では、磁性流体シー
ルカップラー１０のガス導入出口１１に圧力計１３を取
り付けている。従って、第１の磁性流体シール領域の磁
性流体ハロゲンガスでの劣化によるガス溜め用空間の圧
力変化を測定することにより磁性流体の劣化が分かる。Next, in a second usage example shown in FIG. 3, a pressure gauge 13 is attached to the gas introduction outlet 11 of the magnetic fluid seal coupler 10. Therefore, the deterioration of the magnetic fluid can be detected by measuring the pressure change in the gas reservoir space due to the deterioration of the magnetic fluid in the first magnetic fluid sealing region due to the halogen gas.
次に、第４図に示した第３の使用例では、磁性流体シー
ルカップラー１０のガス導入出口１１に加圧装置１４を
取り付けており、この加圧装置１４から加圧してガス溜
め用空間の圧力を磁性流体シールカップラー１０が取り
付けられるガス封入装置内部の圧力より高くしている。Next, in the third usage example shown in FIG. 4, a pressurizing device 14 is attached to the gas introduction outlet 11 of the magnetic fluid seal coupler 10, and the pressurizing device 14 applies pressure to fill the gas reservoir space. The pressure is higher than the pressure inside the gas enclosure to which the ferrofluidic seal coupler 10 is attached.
従って、第１の磁性流体シール領域の磁性流体がハロゲ
ンガスにより劣化して気密が保たれなくなると加圧装置
１４からガス封入装置内部へガスが流れるので、ガス封
入装置内部のハロゲンガスを含むガスがガス封入装置外
部へ流れ出ない。また、ガスの流れを検知することによ
り磁性流体の劣化も分かる。Therefore, when the magnetic fluid in the first magnetic fluid sealing area deteriorates due to halogen gas and airtightness is no longer maintained, gas flows from the pressurizing device 14 into the gas filling device, so that the gas containing halogen gas inside the gas filling device does not flow out of the gas filling device. Deterioration of the magnetic fluid can also be detected by detecting the flow of gas.
なお、本発明による磁性流体シールカップラーの第１お
よび第２の磁性流体シール領域の磁性流体には、耐ハロ
ゲン性の高い油を使用しても良いが、第２の磁性流体シ
ール領域の磁性流体はハロゲンガスに触れないので、磁
化率が大きく耐ハロゲン性の低い油を用いても良いこと
は明らかである。Note that oil with high halogen resistance may be used as the magnetic fluid in the first and second magnetic fluid sealing regions of the magnetic fluid seal coupler according to the present invention, but the magnetic fluid in the second magnetic fluid sealing region It is clear that oil with high magnetic susceptibility and low halogen resistance may be used since it does not come into contact with halogen gas.
以上述べたように本発明は、磁性流体のシール効果の劣
化によりガス封入装置外部への突発的なハロゲンガス等
を含むガスの漏洩が生じる前に磁性流体のシール効果の
劣化を検知できるため、作業環境の汚染を防げ、人体へ
の安全を図ることができる効果がある。As described above, the present invention can detect deterioration of the sealing effect of the magnetic fluid before sudden leakage of gas containing halogen gas etc. to the outside of the gas filling device occurs due to deterioration of the sealing effect of the magnetic fluid. This has the effect of preventing contamination of the working environment and improving human safety.
第１図は本発明の磁性流体シールカップラーの一実施例
を示す一部断面図を含む側面図、第２図。
第３図、第４図はそれぞれ第１図に示した磁性流体シー
ルカップラーの第１．第２．第３の使用例を示す装置の
側面図、第５図は従来の磁性流体シールカップラーの一
例を示す一部断面を含む側面図である。
１・・・ガス溜め用空間、２，１１・・・ガス導入出口
、３・・・第１の磁性流体シール領域の磁性流体、４・
・・第２の磁性流体シール領域の磁性流体、５，１６・
・・ポールピース、６．１７・・・磁石、７，１８・・
・シャフト、８，１９・・・ベアリング、９，２ｏ・・
・ケース、１０・・・磁性流体シールカップラー、１２
・・・ハロゲン検出器、１３・・・圧力計、１４・・・
加圧装置１５・・・磁性流体。
第２０
第３品
茅４−図
茅５図FIG. 1 is a side view including a partial sectional view showing an embodiment of the magnetic fluid seal coupler of the present invention, and FIG. 3 and 4 respectively show the first section of the magnetic fluid seal coupler shown in FIG. Second. FIG. 5 is a side view of a device showing a third usage example, and FIG. 5 is a side view including a partial cross section showing an example of a conventional magnetic fluid seal coupler. DESCRIPTION OF SYMBOLS 1... Space for gas reservoir, 2, 11... Gas introduction outlet, 3... Magnetic fluid of the first magnetic fluid sealing area, 4...
...Magnetic fluid in the second magnetic fluid sealing area, 5, 16.
...Pole piece, 6.17...Magnet, 7,18...
・Shaft, 8, 19...Bearing, 9, 2o...
・Case, 10...Magnetic fluid seal coupler, 12
...Halogen detector, 13...Pressure gauge, 14...
Pressurizing device 15...magnetic fluid. No. 20 3rd item Kaya 4-Figure Kaya 5
Claims (1)
ちながらこのガス封入装置の内部から外部へ回転動力を
伝達するシャフトを持つ磁性流体シールカップラーにお
いて、前記磁性流体シールカップラーの長手方向の中間
に前記シャフトが貫通しているガス溜め用空間と、この
ガス溜め用空間内のガスの封入、排気を行うガス導入出
口と、前記ガス溜め用空間を挟んで前記ガス封入装置お
よびその反対側にそれぞれ設けられた第１および第２の
磁性流体シール領域を備えることを特徴とする磁性流体
シールカップラー。In a magnetic fluid seal coupler having a shaft that transmits rotational power from the inside of the gas enclosure device to the outside while maintaining airtightness inside the gas enclosure device such as a high pressure device or a vacuum device, the longitudinal center of the magnetic fluid seal coupler is provided. a gas reservoir space through which the shaft penetrates; a gas introduction outlet for sealing and exhausting gas in the gas reservoir space; and the gas filling device and the opposite side of the gas reservoir space with the gas reservoir space in between. A ferrofluid seal coupler comprising respective first and second ferrofluid seal regions.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61271307A JPS63125866A (en) | 1986-11-13 | 1986-11-13 | Magnetic fluid seal coupler |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61271307A JPS63125866A (en) | 1986-11-13 | 1986-11-13 | Magnetic fluid seal coupler |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63125866A true JPS63125866A (en) | 1988-05-30 |
Family
ID=17498223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61271307A Pending JPS63125866A (en) | 1986-11-13 | 1986-11-13 | Magnetic fluid seal coupler |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63125866A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106641273A (en) * | 2017-02-24 | 2017-05-10 | 自贡兆强环保科技股份有限公司 | Magnetic liquid seal device for chemical reactor and control system for magnetic liquid seal device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6179075A (en) * | 1984-09-21 | 1986-04-22 | Hitachi Ltd | Magnetic fluid shaft sealing device |
-
1986
- 1986-11-13 JP JP61271307A patent/JPS63125866A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6179075A (en) * | 1984-09-21 | 1986-04-22 | Hitachi Ltd | Magnetic fluid shaft sealing device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106641273A (en) * | 2017-02-24 | 2017-05-10 | 自贡兆强环保科技股份有限公司 | Magnetic liquid seal device for chemical reactor and control system for magnetic liquid seal device |
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