JPS63124637U - - Google Patents
Info
- Publication number
- JPS63124637U JPS63124637U JP1518487U JP1518487U JPS63124637U JP S63124637 U JPS63124637 U JP S63124637U JP 1518487 U JP1518487 U JP 1518487U JP 1518487 U JP1518487 U JP 1518487U JP S63124637 U JPS63124637 U JP S63124637U
- Authority
- JP
- Japan
- Prior art keywords
- shear type
- type gauges
- voltage
- output
- applying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 5
Landscapes
- Measuring Fluid Pressure (AREA)
Description
第１図は本考案の１実施例を示すブロツク図、
第２図は本考案のうち剪断形ゲージの部分の他の
実施例の構成を示す構成図、第３図はマイクロプ
ロセツサを用いた本考案の１実施例の構成を示す
ブロツク図、第４図は従来の半導体圧力変換装置
のうちの圧力センサ部の構成を示す構成図、第５
図は第４図に示す圧力センサ部を用いた従来の半
導体圧力変換装置の構成を示すブロツク図である
。
１，１６……ダイヤフラム、８，１７，１８，
２１，２２……剪断形ゲージ、２３……アナログ
／デジタル変換器、２４……マイクロプロセツサ
、Ｖｓ……電源電圧、Ｖ１，Ｖ２，Ｖ０……出力
電圧、Ｑ１〜Ｑ５……増幅器、Ｖｃ１，Ｖｃ１…
…制御信号。
FIG. 1 is a block diagram showing one embodiment of the present invention.
FIG. 2 is a block diagram showing the configuration of another embodiment of the shear type gauge portion of the present invention, FIG. 3 is a block diagram showing the configuration of one embodiment of the present invention using a microprocessor, and FIG. The figure is a configuration diagram showing the configuration of a pressure sensor part of a conventional semiconductor pressure transducer.
This figure is a block diagram showing the configuration of a conventional semiconductor pressure transducer using the pressure sensor section shown in FIG. 4. 1, 16...Diaphragm, 8, 17, 18,
21, 22...Shear type gauge, 23...Analog/digital converter, 24...Microprocessor, Vs...Power supply voltage, V1 , V2 , V0 ...Output voltage, Q1 to Q5 ... ...Amplifier, Vc 1 , Vc 1 ...
…Control signal.
Claims (1)
数個の剪断形ゲージと、電源端が直列に接続され
た前記各剪断形ゲージに電圧を印加する電圧印加
手段と、前記各剪断形ゲージの各出力端に得られ
る各出力電圧をバツフア増幅器を介して入力し加
算する加算手段とを具備することを特徴とする半
導体圧力変換装置。 A plurality of shear type gauges formed on a strain-generating portion of a semiconductor diaphragm, a voltage applying means for applying a voltage to each of the shear type gauges whose power supply terminals are connected in series, and each output of each of the shear type gauges. What is claimed is: 1. A semiconductor pressure transducer comprising: an adding means for inputting and adding each output voltage obtained at the terminal via a buffer amplifier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1518487U JPS63124637U (en) | 1987-02-04 | 1987-02-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1518487U JPS63124637U (en) | 1987-02-04 | 1987-02-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63124637U true JPS63124637U (en) | 1988-08-15 |
Family
ID=30805880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1518487U Pending JPS63124637U (en) | 1987-02-04 | 1987-02-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63124637U (en) |
-
1987
- 1987-02-04 JP JP1518487U patent/JPS63124637U/ja active Pending