JPS63123096U - - Google Patents
Info
- Publication number
- JPS63123096U JPS63123096U JP1538787U JP1538787U JPS63123096U JP S63123096 U JPS63123096 U JP S63123096U JP 1538787 U JP1538787 U JP 1538787U JP 1538787 U JP1538787 U JP 1538787U JP S63123096 U JPS63123096 U JP S63123096U
- Authority
- JP
- Japan
- Prior art keywords
- container
- gas
- plasma
- electrodes
- frequency induction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006698 induction Effects 0.000 claims description 4
- 238000001816 cooling Methods 0.000 description 1
Landscapes
- Plasma Technology (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1538787U JPS63123096U (id) | 1987-02-04 | 1987-02-04 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1538787U JPS63123096U (id) | 1987-02-04 | 1987-02-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63123096U true JPS63123096U (id) | 1988-08-10 |
Family
ID=30806273
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1538787U Pending JPS63123096U (id) | 1987-02-04 | 1987-02-04 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63123096U (id) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009004157A (ja) * | 2007-06-20 | 2009-01-08 | Univ Nagoya | プラズマ発生装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5532317A (en) * | 1978-08-28 | 1980-03-07 | Asahi Chemical Ind | High frequency magnetic field coupling arc plasma reactor |
-
1987
- 1987-02-04 JP JP1538787U patent/JPS63123096U/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5532317A (en) * | 1978-08-28 | 1980-03-07 | Asahi Chemical Ind | High frequency magnetic field coupling arc plasma reactor |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009004157A (ja) * | 2007-06-20 | 2009-01-08 | Univ Nagoya | プラズマ発生装置 |