JPS63122211U - - Google Patents

Info

Publication number

JPS63122211U

JPS63122211U JP1284187U JP1284187U JPS63122211U JP S63122211 U JPS63122211 U JP S63122211U JP 1284187 U JP1284187 U JP 1284187U JP 1284187 U JP1284187 U JP 1284187U JP S63122211 U JPS63122211 U JP S63122211U

Authority

JP

Japan

Prior art keywords

light

measuring device

photodetector

displacement measuring

measured

Prior art date

1987-02-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000006073 displacement reaction Methods 0.000 claims description 10
• 230000003287 optical effect Effects 0.000 claims description 6
• 238000003384 imaging method Methods 0.000 claims description 2
• 230000001678 irradiating effect Effects 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 5
• 238000005259 measurement Methods 0.000 description 1

Cited By (2)