JPS63121440U - - Google Patents
Info
- Publication number
- JPS63121440U JPS63121440U JP1321187U JP1321187U JPS63121440U JP S63121440 U JPS63121440 U JP S63121440U JP 1321187 U JP1321187 U JP 1321187U JP 1321187 U JP1321187 U JP 1321187U JP S63121440 U JPS63121440 U JP S63121440U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- wafer
- drying
- turntable
- bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001035 drying Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Drying Of Solid Materials (AREA)
- Centrifugal Separators (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1321187U JPS63121440U (cs) | 1987-01-31 | 1987-01-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1321187U JPS63121440U (cs) | 1987-01-31 | 1987-01-31 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63121440U true JPS63121440U (cs) | 1988-08-05 |
Family
ID=30802058
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1321187U Pending JPS63121440U (cs) | 1987-01-31 | 1987-01-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63121440U (cs) |
-
1987
- 1987-01-31 JP JP1321187U patent/JPS63121440U/ja active Pending