JPS6375943U - - Google Patents
Info
- Publication number
- JPS6375943U JPS6375943U JP17076986U JP17076986U JPS6375943U JP S6375943 U JPS6375943 U JP S6375943U JP 17076986 U JP17076986 U JP 17076986U JP 17076986 U JP17076986 U JP 17076986U JP S6375943 U JPS6375943 U JP S6375943U
- Authority
- JP
- Japan
- Prior art keywords
- process chamber
- rotating shaft
- disk
- spindle
- bearing part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 7
- 238000005468 ion implantation Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims 2
- 239000011796 hollow space material Substances 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 239000011553 magnetic fluid Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17076986U JPS6375943U (cs) | 1986-11-06 | 1986-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17076986U JPS6375943U (cs) | 1986-11-06 | 1986-11-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6375943U true JPS6375943U (cs) | 1988-05-20 |
Family
ID=31105791
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17076986U Pending JPS6375943U (cs) | 1986-11-06 | 1986-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6375943U (cs) |
-
1986
- 1986-11-06 JP JP17076986U patent/JPS6375943U/ja active Pending