JPH04747U - - Google Patents
Info
- Publication number
- JPH04747U JPH04747U JP3959190U JP3959190U JPH04747U JP H04747 U JPH04747 U JP H04747U JP 3959190 U JP3959190 U JP 3959190U JP 3959190 U JP3959190 U JP 3959190U JP H04747 U JPH04747 U JP H04747U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- drying apparatus
- support
- main body
- piping
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000001035 drying Methods 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3959190U JPH04747U (cs) | 1990-04-13 | 1990-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3959190U JPH04747U (cs) | 1990-04-13 | 1990-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04747U true JPH04747U (cs) | 1992-01-07 |
Family
ID=31548638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3959190U Pending JPH04747U (cs) | 1990-04-13 | 1990-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04747U (cs) |
-
1990
- 1990-04-13 JP JP3959190U patent/JPH04747U/ja active Pending