JPS63121434U - - Google Patents

Info

Publication number
JPS63121434U
JPS63121434U JP1353587U JP1353587U JPS63121434U JP S63121434 U JPS63121434 U JP S63121434U JP 1353587 U JP1353587 U JP 1353587U JP 1353587 U JP1353587 U JP 1353587U JP S63121434 U JPS63121434 U JP S63121434U
Authority
JP
Japan
Prior art keywords
substrate
notch
holding part
rotary coating
rotates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1353587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0331073Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1353587U priority Critical patent/JPH0331073Y2/ja
Publication of JPS63121434U publication Critical patent/JPS63121434U/ja
Application granted granted Critical
Publication of JPH0331073Y2 publication Critical patent/JPH0331073Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1353587U 1987-01-30 1987-01-30 Expired JPH0331073Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1353587U JPH0331073Y2 (enrdf_load_stackoverflow) 1987-01-30 1987-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1353587U JPH0331073Y2 (enrdf_load_stackoverflow) 1987-01-30 1987-01-30

Publications (2)

Publication Number Publication Date
JPS63121434U true JPS63121434U (enrdf_load_stackoverflow) 1988-08-05
JPH0331073Y2 JPH0331073Y2 (enrdf_load_stackoverflow) 1991-07-01

Family

ID=30802683

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1353587U Expired JPH0331073Y2 (enrdf_load_stackoverflow) 1987-01-30 1987-01-30

Country Status (1)

Country Link
JP (1) JPH0331073Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007305614A (ja) * 2006-05-08 2007-11-22 Tokyo Electron Ltd 基板の反り測定装置及び基板処理システム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007305614A (ja) * 2006-05-08 2007-11-22 Tokyo Electron Ltd 基板の反り測定装置及び基板処理システム

Also Published As

Publication number Publication date
JPH0331073Y2 (enrdf_load_stackoverflow) 1991-07-01

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