JPS63121361U - - Google Patents

Info

Publication number
JPS63121361U
JPS63121361U JP1257887U JP1257887U JPS63121361U JP S63121361 U JPS63121361 U JP S63121361U JP 1257887 U JP1257887 U JP 1257887U JP 1257887 U JP1257887 U JP 1257887U JP S63121361 U JPS63121361 U JP S63121361U
Authority
JP
Japan
Prior art keywords
target
generating means
column
electron beam
deflection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1257887U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0451414Y2 (US07714131-20100511-C00038.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1257887U priority Critical patent/JPH0451414Y2/ja
Publication of JPS63121361U publication Critical patent/JPS63121361U/ja
Application granted granted Critical
Publication of JPH0451414Y2 publication Critical patent/JPH0451414Y2/ja
Expired legal-status Critical Current

Links

JP1257887U 1987-01-30 1987-01-30 Expired JPH0451414Y2 (US07714131-20100511-C00038.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1257887U JPH0451414Y2 (US07714131-20100511-C00038.png) 1987-01-30 1987-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1257887U JPH0451414Y2 (US07714131-20100511-C00038.png) 1987-01-30 1987-01-30

Publications (2)

Publication Number Publication Date
JPS63121361U true JPS63121361U (US07714131-20100511-C00038.png) 1988-08-05
JPH0451414Y2 JPH0451414Y2 (US07714131-20100511-C00038.png) 1992-12-03

Family

ID=30800839

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1257887U Expired JPH0451414Y2 (US07714131-20100511-C00038.png) 1987-01-30 1987-01-30

Country Status (1)

Country Link
JP (1) JPH0451414Y2 (US07714131-20100511-C00038.png)

Also Published As

Publication number Publication date
JPH0451414Y2 (US07714131-20100511-C00038.png) 1992-12-03

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