JPS63119676U - - Google Patents

Info

Publication number
JPS63119676U
JPS63119676U JP1179087U JP1179087U JPS63119676U JP S63119676 U JPS63119676 U JP S63119676U JP 1179087 U JP1179087 U JP 1179087U JP 1179087 U JP1179087 U JP 1179087U JP S63119676 U JPS63119676 U JP S63119676U
Authority
JP
Japan
Prior art keywords
chamber
coated
large number
preheating
baking
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1179087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0332524Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987011790U priority Critical patent/JPH0332524Y2/ja
Publication of JPS63119676U publication Critical patent/JPS63119676U/ja
Application granted granted Critical
Publication of JPH0332524Y2 publication Critical patent/JPH0332524Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Coating Apparatus (AREA)
JP1987011790U 1987-01-29 1987-01-29 Expired JPH0332524Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987011790U JPH0332524Y2 (cs) 1987-01-29 1987-01-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987011790U JPH0332524Y2 (cs) 1987-01-29 1987-01-29

Publications (2)

Publication Number Publication Date
JPS63119676U true JPS63119676U (cs) 1988-08-02
JPH0332524Y2 JPH0332524Y2 (cs) 1991-07-10

Family

ID=30799327

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987011790U Expired JPH0332524Y2 (cs) 1987-01-29 1987-01-29

Country Status (1)

Country Link
JP (1) JPH0332524Y2 (cs)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5341702A (en) * 1976-09-29 1978-04-15 Hitachi Ltd Production of electric wire flux
JPS5740920A (en) * 1980-08-25 1982-03-06 Toshiba Corp Supporter for semiconductor wafer
JPS614530U (ja) * 1984-06-15 1986-01-11 ヤンマー農機株式会社 田植機の走行装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5341702A (en) * 1976-09-29 1978-04-15 Hitachi Ltd Production of electric wire flux
JPS5740920A (en) * 1980-08-25 1982-03-06 Toshiba Corp Supporter for semiconductor wafer
JPS614530U (ja) * 1984-06-15 1986-01-11 ヤンマー農機株式会社 田植機の走行装置

Also Published As

Publication number Publication date
JPH0332524Y2 (cs) 1991-07-10

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