JPS63118903U - - Google Patents
Info
- Publication number
- JPS63118903U JPS63118903U JP1015587U JP1015587U JPS63118903U JP S63118903 U JPS63118903 U JP S63118903U JP 1015587 U JP1015587 U JP 1015587U JP 1015587 U JP1015587 U JP 1015587U JP S63118903 U JPS63118903 U JP S63118903U
- Authority
- JP
- Japan
- Prior art keywords
- fluorocarbon
- cleaning tank
- tank
- suction
- suction port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 9
- 238000004140 cleaning Methods 0.000 claims description 4
- 230000005494 condensation Effects 0.000 claims description 2
- 238000009833 condensation Methods 0.000 claims description 2
- 230000018044 dehydration Effects 0.000 claims description 2
- 238000006297 dehydration reaction Methods 0.000 claims description 2
- 238000011084 recovery Methods 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 1
- 239000002904 solvent Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Treating Waste Gases (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987010155U JPH0434881Y2 (ar) | 1987-01-27 | 1987-01-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987010155U JPH0434881Y2 (ar) | 1987-01-27 | 1987-01-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63118903U true JPS63118903U (ar) | 1988-08-01 |
| JPH0434881Y2 JPH0434881Y2 (ar) | 1992-08-19 |
Family
ID=30796191
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987010155U Expired JPH0434881Y2 (ar) | 1987-01-27 | 1987-01-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0434881Y2 (ar) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05144796A (ja) * | 1991-11-20 | 1993-06-11 | Nec Yamaguchi Ltd | 洗浄装置 |
| JP2007190468A (ja) * | 2006-01-18 | 2007-08-02 | Matsushita Electric Ind Co Ltd | 有機溶剤除去システム |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6214901A (ja) * | 1985-07-15 | 1987-01-23 | Sony Corp | フロン蒸気洗浄装置 |
-
1987
- 1987-01-27 JP JP1987010155U patent/JPH0434881Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6214901A (ja) * | 1985-07-15 | 1987-01-23 | Sony Corp | フロン蒸気洗浄装置 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05144796A (ja) * | 1991-11-20 | 1993-06-11 | Nec Yamaguchi Ltd | 洗浄装置 |
| JP2007190468A (ja) * | 2006-01-18 | 2007-08-02 | Matsushita Electric Ind Co Ltd | 有機溶剤除去システム |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0434881Y2 (ar) | 1992-08-19 |
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