JPS63115601U - - Google Patents
Info
- Publication number
- JPS63115601U JPS63115601U JP763087U JP763087U JPS63115601U JP S63115601 U JPS63115601 U JP S63115601U JP 763087 U JP763087 U JP 763087U JP 763087 U JP763087 U JP 763087U JP S63115601 U JPS63115601 U JP S63115601U
- Authority
- JP
- Japan
- Prior art keywords
- piston
- pressure chamber
- low
- vacuum pump
- atmosphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 1
Landscapes
- Fluid-Driven Valves (AREA)
- Fluid-Pressure Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP763087U JPS63115601U (da) | 1987-01-23 | 1987-01-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP763087U JPS63115601U (da) | 1987-01-23 | 1987-01-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS63115601U true JPS63115601U (da) | 1988-07-26 |
Family
ID=30791262
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP763087U Pending JPS63115601U (da) | 1987-01-23 | 1987-01-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS63115601U (da) |
-
1987
- 1987-01-23 JP JP763087U patent/JPS63115601U/ja active Pending