JPS63115222U - - Google Patents
Info
- Publication number
- JPS63115222U JPS63115222U JP734987U JP734987U JPS63115222U JP S63115222 U JPS63115222 U JP S63115222U JP 734987 U JP734987 U JP 734987U JP 734987 U JP734987 U JP 734987U JP S63115222 U JPS63115222 U JP S63115222U
- Authority
- JP
- Japan
- Prior art keywords
- pad
- width
- cutting
- measuring pad
- slit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 2
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP734987U JPH0514513Y2 (ko) | 1987-01-21 | 1987-01-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP734987U JPH0514513Y2 (ko) | 1987-01-21 | 1987-01-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63115222U true JPS63115222U (ko) | 1988-07-25 |
| JPH0514513Y2 JPH0514513Y2 (ko) | 1993-04-19 |
Family
ID=30790717
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP734987U Expired - Lifetime JPH0514513Y2 (ko) | 1987-01-21 | 1987-01-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0514513Y2 (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01186652A (ja) * | 1988-01-14 | 1989-07-26 | Seiko Epson Corp | 半導体装置 |
| KR100960890B1 (ko) | 2007-12-27 | 2010-06-04 | 주식회사 동부하이텍 | 금속 배선의 검사를 위한 ｐｃｍ 테스트 패턴 |
-
1987
- 1987-01-21 JP JP734987U patent/JPH0514513Y2/ja not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01186652A (ja) * | 1988-01-14 | 1989-07-26 | Seiko Epson Corp | 半導体装置 |
| KR100960890B1 (ko) | 2007-12-27 | 2010-06-04 | 주식회사 동부하이텍 | 금속 배선의 검사를 위한 ｐｃｍ 테스트 패턴 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0514513Y2 (ko) | 1993-04-19 |