JPS63114887A - Work carrying robot - Google Patents

Abstract

(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a workpiece transport robot that transports workpieces such as wafers and magnetic disks in, for example, chemical vapor deposition equipment or surface inspection equipment in a clean room. The present invention relates to a workpiece transfer robot that can improve the degree of freedom and accuracy and eliminate dust generation.

2. Description of the Related Art As shown in FIG. 3, a conventional workpiece transfer robot includes a transfer rail 1 laid from a predetermined location to another predetermined location, and an X-axis moving frame that moves in the X-axis direction on the transfer rail 1. 2, and an X that moves in the y-axis direction on this X-axis moving frame 2.
It consisted of an axially movable pedestal 3 and a handling mechanism 5 that moves up and down in two axes on the X-axis movable pedestal 3 and holds a workpiece 4 such as a wafer or a magnetic disk. The X-axis moving frame 2 is as shown in FIG.

Suspension wheels 7.7 are fitted into grooves 6 formed on the upper surface of the conveyor rail 1, and are mounted on stepped portions of the upper inner wall thereof.・・・
- It is moved in the X-axis direction along the conveyance rail 1 by a ball screw 9 that is supported by abutting (for example, a ball bearing) and rotated by the X-axis control motor 8 shown in FIG. There is. In addition, in Fig. 4,
Reference numeral 10 indicates a screw hole into which the ball screw 9 is screwed into the X-axis moving frame 2. Further, an X-axis moving frame 3 is incorporated into the X-axis moving frame 2 with a structure similar to that shown in FIG. 4, and this X-axis moving frame 3 is rotated by an X-axis control motor 11. It is moved in the y-axis direction on the X-axis moving frame 2 by a ball screw (not visible in FIG. 3). Furthermore, on the top surface of the X-axis moving frame 3,
A handling mechanism 5 for the workpiece 4 is provided, and is configured to move an arm 12 up and down in biaxial directions and rotate the arm 12 in the directions of arrows A and B. In addition.

In FIG. 3, reference numeral 13 is a cable for power supply from an external power supply device.

Problems to be Solved by the Invention However, in such a conventional work transfer robot, the drive means for the X-axis moving pedestal 2 and the X-axis moving pedestal 3 are
As shown in FIGS. 3 and 4.

Threaded engagement between a ball screw 9 rotated by the X-axis control motor 8 and its screw hole 10 and the suspension axle 7, and also between a ball screw rotated by the X-axis control motor 11 and its screw hole Since this is done by screwing and suspending wheels, the ball screws, their screw holes, and the suspension axles wear out with use, generating dust. Therefore, dust may adhere to the workpiece 4, resulting in a decrease in product yield and quality. Further, as described above, the ball screw, its screw hole, and the suspension axle wear out due to use, which deteriorates the mechanical accuracy of the robot and reduces the accuracy of transporting the workpiece 4. Furthermore, especially when moving in the X-axis direction, the ball screw 9 must be tensioned over its entire length in the direction of movement, but there is a certain limit to the tension length due to sagging of the member, etc., and handling is difficult. It was not possible to move the mechanism 5 over a long distance in the X-axis direction, and the degree of freedom in robot movement could not be said to be high. Also, -dan ball screw 9. To extend the transport distance in the X-axis direction after stretching a certain length,
The entire ball screw 9 had to be replaced with a longer one, and flexibility regarding extension was low.

Therefore, an object of the present invention is to provide a workpiece transfer robot that can solve such problems.

Means for Solving the Problems The means of the present invention for solving the above problems is a transport rail installed from a predetermined location to another predetermined location, and an X-axis movement that moves in the X-axis direction on the transport rail. It has a mount, an X-axis moving mount that moves in the y-axis direction on this X-axis moving mount, and a handling mechanism that moves up and down in two axes on this X-axis moving mount and holds a workpiece. In the workpiece transfer robot that transfers the workpiece, the workpiece transfer robot uses linear motors as drive means in the x-, y-, and z-axis directions of the X-axis moving pedestal, the X-axis moving pedestal, and the handling mechanism, respectively.

Embodiments Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view showing an embodiment of a work transfer robot according to the present invention. This workpiece transport port is used to transport works such as wafers and magnetic disks in, for example, chemical vapor deposition equipment or surface inspection equipment in a clean room, and includes a transport rail 15, an X-axis moving frame 16, It has an axis moving frame 17 and a handling mechanism 18.

In the figure, the transport rail 15 is connected to the handling mechanism 18.
It forms a movement route, and is laid in a straight line with an appropriate length from a predetermined location to another predetermined location. An X-axis moving frame 16 is mounted on the upper surface of the transport rail 15 . This X-axis moving frame 16 moves in the X-axis direction on the conveyance rail 15, and is moved along the longitudinal direction of the conveyance rail 15 by a driving means to be described later. An X-axis movable pedestal 17 straddles the upper surface of the X-axis movable pedestal 16 . This X-axis moving pedestal 17 moves in the y-axis direction on the X-axis moving pedestal 16, and is moved in a direction perpendicular to the longitudinal direction of the transport rail 15 by a drive means described later. A handling mechanism 18 is provided above the y#I movable frame 17. This handling mechanism 18 includes the X-axis moving frame 1
The workpiece 4 is held at the tip of an arm 19 that moves vertically in two axes at the top of the rail 7 and protrudes horizontally. It has become.

The workpiece 4 is held by the arm 19, for example, by a suction air pump built into the handling mechanism 18.
It is designed to be held by vacuum suction with a suction port 20 provided at the tip.

Further, the arm 19 is configured to be rotated in the directions of arrows A and B by a rotational drive source built into the handling mechanism 18.

Here, in the present invention, the driving means in the Z+'ItZ-axis direction of the X-axis moving frame 16, the X-axis moving frame 17, and the handling mechanism 18 are each a linear motor. First, the drive means for the X-axis moving pedestal 16 is a linear motor consisting of a combination of the transport rail 15 and the X-axis moving pedestal 16 itself. That is, on the transport rail 15.

As shown in FIG. 1, two guide grooves 21, 21 extending linearly along the longitudinal direction are formed on the upper surface, and the upper surface between the two guide grooves 21. is a scale 22 perpendicular to the longitudinal direction of the guide groove 21.
, 22. ... are formed in an uneven shape at a predetermined pitch. In addition, as shown in FIG.
Two guide protrusions 23, 23 that fit into the guide protrusions 1 are provided, and a coil 24 and a permanent magnet 25 are embedded inside the guide protrusions on the bottom side and in the center, respectively.

Then, as shown in FIG. 2, the guide protrusions 2 of the
3 and 23 to combine them, and transfer rail 15
A linear stepping motor is constructed in which the X-axis movable frame 16 serves as a fixed part (stator) and the movable part (armature).

In this case, the coil 24 in the X-axis moving frame 16 and the scales 22, 22 . ... constitute a magnetic circuit, and the coil 24 and the scales 22, 22 .
The X-axis moving frame 16 is connected to the transport rail 1 by strengthening or weakening the lines of magnetic force depending on the positional relationship with the pitch of the
5 in the X-axis direction. In addition,
Between the guide groove 21 and the guide protrusion 23, rollers or ball bearings are fitted, or lubricating oil or magnetic fluid is interposed.
The shaft moving frame 16 is designed to move smoothly.

Next, the drive means for the X-axis movable frame 17 is a linear motor consisting of a combination of the X-axis movable frame 16 and the X-axis movable frame 17 themselves.

That is, as shown in FIG. 1, the X-axis moving frame 16 has two guide grooves 26° 26 formed on its upper surface that extend linearly orthogonally to the longitudinal direction of the transport rail 15. On the upper surface between these two guide grooves 26, 26, there is a scale 27 that is perpendicular to the longitudinal direction of the guide grooves 26.
, 27. ... are formed in an uneven shape at a predetermined pitch. Further, the X-axis moving frame 17 is provided with a guide protrusion (23), a coil (24), and a permanent magnet (25), as shown in FIG. Then, as shown in FIG. 2, the X-axis movable frame 16 and the X-axis movable frame 17 are combined, and the X-axis movable frame 16 is fixed to the fixed part (stator).
At the same time, the X-axis moving frame 17 is a movable part (armature)
It constitutes a linear stepping motor.

Next, as shown in FIG. 1, the driving means of the handling mechanism 18 moves the transport rail 15 inside the
A rail member 28 erected and fixed perpendicular to the upper surface and a Z-axis moving block 29 that moves up and down along the longitudinal direction of this rail member 28 are combined in the same structure as shown in FIG. The above rail member 28 is fixed to the fixed part (stator)
It is a linear stepping motor having a two-axis moving block 29 as a movable part (armature).

A drive lever 30 extending upward from the two-axis moving block 29 is connected to a part of the head 31 of the handling mechanism 18, thereby causing the entire handling mechanism 18 to move up and down in the ZN direction. .

The supply of electric power to the driving means in the x, y, and z axis directions of the X-axis moving frame 16, the X-axis moving frame 17, and the handling mechanism 18 configured as described above is as follows.
As with the conventional device shown in FIG. 3, the power may be supplied from an external power supply via the cable 13, or a solar cell may be attached to the outer surface of each movable frame 16, 17 and the power may be charged by the solar cell. For example, a storage battery may be built into the X-axis moving frame 17, and the power supply may be supplied by a power supply device consisting of a combination of the solar cell and the storage battery.

In addition, a portion 32 where the head 31 of the handling mechanism 18 fits into the upper end of the X-axis moving frame 17 and slides up and down, and a portion 33 where the arm 19 protrudes horizontally and rotates in the directions of arrows A and B. A magnetic fluid seal made of a combination of magnetic fluid and a permanent magnet is provided in the shape of a headband. Therefore, the handling mechanism 18 can be sealed to prevent dust generated inside it from coming out. Furthermore, it is desirable that the entire handling machine [18] be covered with an organic material with low dust generation, such as Teflon, polyurethane, or silicone. Furthermore, it is desirable that the external shape of the member be streamlined in consideration of the downflow within the clean room so that vortices are not generated behind the member.

Effects of the Invention As explained above, the present invention provides the X-axis moving frame 16 and the
Since linear motors are used as driving means in the X, y, and z axes directions of the shaft moving frame 17 and the handling mechanism 18, the ball screw 9 and its screw hole 10 and its screw hole 10 as in the conventional device shown in FIG. 3 and FIG. Dust generation caused by wear due to use of the suspension axle 7 can be eliminated. Therefore, the workpiece transfer robot as a whole can be highly clean by reducing the causes of dust generation, and the adhesion of dust to the workpiece 4 can be reduced, and the yield and quality of the product can be improved. From this, according to the present invention,
A clean robot suitable for use in a clean room can be realized.

In addition, in the linear motor drive, there is no wear part due to the screwing rotation of the ball screw 9 and its screw hole 10 as in the conventional case, and the mechanical accuracy of the robot hardly deteriorates due to use.

The accuracy of conveyance of the workpiece 4 can be maintained at a high level of accuracy.

Furthermore, especially when moving in the X-axis direction, the transport rail 15
Since the transport rails 15 can be laid as long as desired, the handling mechanism 18 can be moved a long distance in the X-axis direction simply by laying the conveyor rails 15 over a long distance, improving the freedom of movement of the robot 1. Can be done.

Furthermore, in order to extend the conveyance distance in the X-axis direction, it is sufficient to simply install an additional conveyance rail for that distance to the conveyance rail 15 that has been laid so far, so there is also flexibility regarding extension. can be improved.

[Brief explanation of the drawing]

FIG. 1 is a perspective view showing an embodiment of a workpiece transfer robot according to the present invention, FIG. 2 is a sectional view showing a linear stepping motor as a drive means for an X-axis moving frame, and FIG. 3 is a conventional workpiece transfer robot. The perspective view and FIG. 4 are cross-sectional views showing the combination of the X-axis moving frame and the conveyance rail. 4... Workpiece, 15... Conveyance rail, 16
... X-axis moving frame, 17... Y-axis moving frame,
18... Handling mechanism, 19... Arm,
21.26...Guide groove, 22,27...
・Scale, 23... Guide protrusion, 24...
・Coil, 25... Permanent magnet, 28... Rail member, 29... 2-axis moving block, 30...
drive lever. Applicant Hitachi Electronic Engineering Co., Ltd. Figure 1 Figure 2 Figure 3 Figure 4

Claims (1)

[Claims] A transport rail installed from a predetermined location to another predetermined location, an x-axis moving platform that moves in the x-axis direction on this transport rail, and a y-axis moving platform that moves in the y-axis direction on this x-axis moving platform. , a workpiece transfer robot that moves up and down in the z-axis direction on the y-axis movable pedestal and has a handling mechanism that holds the workpiece, and that transports the workpiece in a clean room, the x-axis movable pedestal, the y-axis movable pedestal, and A workpiece transfer robot characterized in that the driving means in the x-, y-, and z-axis directions of the handling mechanism are linear motors.