JPS63114000U - - Google Patents

Info

Publication number
JPS63114000U
JPS63114000U JP645987U JP645987U JPS63114000U JP S63114000 U JPS63114000 U JP S63114000U JP 645987 U JP645987 U JP 645987U JP 645987 U JP645987 U JP 645987U JP S63114000 U JPS63114000 U JP S63114000U
Authority
JP
Japan
Prior art keywords
zone plate
fresnel zone
linear fresnel
linear
locations
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP645987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP645987U priority Critical patent/JPS63114000U/ja
Publication of JPS63114000U publication Critical patent/JPS63114000U/ja
Pending legal-status Critical Current

Links

JP645987U 1987-01-19 1987-01-19 Pending JPS63114000U (US06815460-20041109-C00097.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP645987U JPS63114000U (US06815460-20041109-C00097.png) 1987-01-19 1987-01-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP645987U JPS63114000U (US06815460-20041109-C00097.png) 1987-01-19 1987-01-19

Publications (1)

Publication Number Publication Date
JPS63114000U true JPS63114000U (US06815460-20041109-C00097.png) 1988-07-22

Family

ID=30789000

Family Applications (1)

Application Number Title Priority Date Filing Date
JP645987U Pending JPS63114000U (US06815460-20041109-C00097.png) 1987-01-19 1987-01-19

Country Status (1)

Country Link
JP (1) JPS63114000U (US06815460-20041109-C00097.png)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008002939A (ja) * 2006-06-22 2008-01-10 Nippon Telegr & Teleph Corp <Ntt> Ｘ線集光レンズ
JP2009047430A (ja) * 2007-08-13 2009-03-05 Nippon Telegr & Teleph Corp <Ntt> Ｘ線集光レンズ
JP2009121904A (ja) * 2007-11-14 2009-06-04 Nippon Telegr & Teleph Corp <Ntt> Ｘ線集光レンズ
JP2009169255A (ja) * 2008-01-18 2009-07-30 Nsk Ltd 露光装置及び基板の製造方法ならびにマスク
JP4705606B2 (ja) * 2007-05-10 2011-06-22 日本電信電話株式会社 Ｘ線集光レンズ

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008002939A (ja) * 2006-06-22 2008-01-10 Nippon Telegr & Teleph Corp <Ntt> Ｘ線集光レンズ
JP4602944B2 (ja) * 2006-06-22 2010-12-22 日本電信電話株式会社 Ｘ線集光レンズ
JP4705606B2 (ja) * 2007-05-10 2011-06-22 日本電信電話株式会社 Ｘ線集光レンズ
JP2009047430A (ja) * 2007-08-13 2009-03-05 Nippon Telegr & Teleph Corp <Ntt> Ｘ線集光レンズ
JP4700034B2 (ja) * 2007-08-13 2011-06-15 日本電信電話株式会社 Ｘ線集光レンズ
JP2009121904A (ja) * 2007-11-14 2009-06-04 Nippon Telegr & Teleph Corp <Ntt> Ｘ線集光レンズ
JP2009169255A (ja) * 2008-01-18 2009-07-30 Nsk Ltd 露光装置及び基板の製造方法ならびにマスク

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