JPS631135B2 - - Google Patents
Info
- Publication number
- JPS631135B2 JPS631135B2 JP57234419A JP23441982A JPS631135B2 JP S631135 B2 JPS631135 B2 JP S631135B2 JP 57234419 A JP57234419 A JP 57234419A JP 23441982 A JP23441982 A JP 23441982A JP S631135 B2 JPS631135 B2 JP S631135B2
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- atmosphere
- vacuum
- shape
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910052782 aluminium Inorganic materials 0.000 claims description 22
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 22
- 238000001125 extrusion Methods 0.000 claims description 22
- 238000000034 method Methods 0.000 claims description 20
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 235000012907 honey Nutrition 0.000 claims description 6
- 239000007789 gas Substances 0.000 description 10
- 239000000126 substance Substances 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 108010083687 Ion Pumps Proteins 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 102000006391 Ion Pumps Human genes 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000005755 formation reaction Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910001593 boehmite Inorganic materials 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000000265 homogenisation Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- FAHBNUUHRFUEAI-UHFFFAOYSA-M hydroxidooxidoaluminium Chemical compound O[Al]=O FAHBNUUHRFUEAI-UHFFFAOYSA-M 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21C—MANUFACTURE OF METAL SHEETS, WIRE, RODS, TUBES OR PROFILES, OTHERWISE THAN BY ROLLING; AUXILIARY OPERATIONS USED IN CONNECTION WITH METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL
- B21C23/00—Extruding metal; Impact extrusion
- B21C23/002—Extruding materials of special alloys so far as the composition of the alloy requires or permits special extruding methods of sequences
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21C—MANUFACTURE OF METAL SHEETS, WIRE, RODS, TUBES OR PROFILES, OTHERWISE THAN BY ROLLING; AUXILIARY OPERATIONS USED IN CONNECTION WITH METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL
- B21C29/00—Cooling or heating work or parts of the extrusion press; Gas treatment of work
- B21C29/006—Gas treatment of work, e.g. to prevent oxidation or to create surface effects
Description
【発明の詳細な説明】
産業上の利用分野
この発明は、真空用アルミニウム押出形材の製
造法に関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application This invention relates to a method for producing an extruded aluminum profile for vacuum use.
この明細書において、アルミニウムとはアルミ
ニウムおよびその合金を含むものとする。 In this specification, aluminum includes aluminum and its alloys.
従来技術とその問題点
イオンポンプ用電極板として最近アルミニウム
板が使用されているが、イオンポンプの容器内を
高い真空度に保持するためには、容器内のアルミ
ニウム製電極板からの真空度低下物質の放出を減
らすことが重要である。Conventional technology and its problems Aluminum plates have recently been used as electrode plates for ion pumps, but in order to maintain a high degree of vacuum inside the ion pump container, it is necessary to reduce the vacuum level from the aluminum electrode plate inside the container. It is important to reduce the release of substances.
アルミニウムは周知のように非常に酸化され易
に金属であり、酸素と触れると外表面に酸化皮膜
が形成される。またアルミニウムが水、湿気など
の水分の存在する環境下に置かれると、その外表
面に水和酸化膜が生成する。そして水和酸化物の
生成反応の温度が高い程水和酸化膜の成長は著し
く、高温環境下ではアルミニウム外表面にベーマ
イトまたはバイアライトなどの水和酸化膜が形成
される。このような水和酸化膜の膜質は、水分の
存在しない環境で形成されるアルミニウム酸化膜
に較べて非常に粗で多孔質状でありかつその孔形
態も複雑にいり込んでいる。加えて膜厚も厚い。 As is well known, aluminum is a metal that oxidizes very easily, and when it comes into contact with oxygen, an oxide film is formed on its outer surface. Furthermore, when aluminum is placed in an environment containing moisture such as water or moisture, a hydrated oxide film is formed on its outer surface. The higher the temperature of the hydrated oxide production reaction, the more remarkable the growth of the hydrated oxide film, and in a high temperature environment, a hydrated oxide film of boehmite or vialite is formed on the outer surface of aluminum. The quality of such a hydrated oxide film is much rougher and more porous than that of an aluminum oxide film formed in an environment where no moisture is present, and the pore morphology is also complicated. In addition, the film thickness is also thick.
ところで、通常の押出成形によるアルミニウム
形材の外表面には、押出成形時水分を含んだ大気
との接触により水和酸化膜が生成され、しかもこ
の水和酸化膜は、押出時高温にさらされるため、
水和酸化膜の生成反応が促進されて厚膜となつて
いる。この水和酸化膜の膜質は上述のとおりのも
のであり、かつ厚膜であるために皮膜に多くの水
分が吸着する。しかも皮膜がちみつさに欠けるた
めに、成形後においても大気中に存在する水分、
ハイドロカーボン、二酸化炭素および一酸化炭素
などの真空度低下物質が皮膜に吸着する。そして
水和酸化膜が上記のようなものであるために、こ
のような真空度低下物質が皮膜内にいわば吸蔵さ
れた形態となり、真空度向上阻害の原因になつて
いると思われる。また押出成形後のアルミニウム
形材の機械的強度を高めるために、高温加熱後、
水冷および空冷などの焼入れ加工や、熱処理が行
なわれるが、このさいにも押出成形時に形成され
た上述の水和酸化膜はさらに成長するとともにす
でに吸着されている真空度低下物質は皮膜に内蔵
される形となる。 By the way, a hydrated oxide film is generated on the outer surface of an aluminum profile formed by ordinary extrusion molding due to contact with the moisture-containing atmosphere during extrusion molding, and this hydrated oxide film is exposed to high temperatures during extrusion. For,
The formation reaction of the hydrated oxide film is promoted, resulting in a thick film. The film quality of this hydrated oxide film is as described above, and since it is a thick film, a large amount of water is adsorbed to the film. Moreover, because the film lacks consistency, moisture that remains in the atmosphere even after molding.
Vacuum degrading substances such as hydrocarbons, carbon dioxide and carbon monoxide are adsorbed onto the coating. Since the hydrated oxide film is as described above, it is thought that such substances that lower the degree of vacuum are occluded in the film, and become a cause of inhibiting the improvement of the degree of vacuum. In addition, in order to increase the mechanical strength of the aluminum shape after extrusion, after heating at high temperature,
Hardening processes such as water cooling and air cooling, and heat treatment are performed, but during this process, the above-mentioned hydrated oxide film formed during extrusion grows further, and the vacuum degree-degrading substances that have already been adsorbed are incorporated into the film. The shape is as follows.
この発明の目的は、上記の問題を解決した真空
用アルミニウム押出形材の製造法を提供すること
にある。 An object of the present invention is to provide a method for manufacturing an extruded aluminum profile for vacuum use, which solves the above-mentioned problems.
問題点を解決するための手段
この発明による真空用アルミニウム押出形材の
製造法は、上記の目的を達成するために、アルミ
ニウム形材を押出成形するにあたり、押出時の形
材が大気と接触しないような雰囲気を形成し、該
雰囲気中へ形材を押出し、該雰囲気中に含まれて
いる酸素により形材の外表面にちみつな酸化皮膜
を形成することを特徴とするものである。Means for Solving the Problems In order to achieve the above object, the method for manufacturing an extruded aluminum profile for vacuum use according to the present invention prevents the extruded profile from coming into contact with the atmosphere when extruding the aluminum profile. The method is characterized by forming such an atmosphere, extruding the shape into the atmosphere, and forming a honey oxide film on the outer surface of the shape due to the oxygen contained in the atmosphere.
アルミニウム押出形材の形状としては、板状、
管状および棒状等のものが一般的である。 The shapes of extruded aluminum shapes are plate-like,
Tubular and rod shapes are common.
上記において押出時の形材が大気と接触しない
ような雰囲気を形成する具体的方法としては、つ
ぎの２つの方法をあげることができる。 In the above, the following two methods can be cited as specific methods for creating an atmosphere in which the extruded shape does not come into contact with the atmosphere.
その１は、押出プレスに、押出方向に長くのび
たスリーブを設け、このスリーブ内に酸素0.5〜
30容量％とくに１〜10容量％、残部不活性ガスよ
りなる混合ガスを供給し、この混合ガスで押出さ
れつつある形材の表面を覆う方法である。なお、
不活性ガスとしては、アルゴンおよびヘリウムが
一般的である。 First, the extrusion press is equipped with a sleeve that extends in the extrusion direction, and the sleeve contains 0.5~
This is a method in which a mixed gas consisting of 30% by volume, particularly 1 to 10% by volume, and the balance being an inert gas is supplied, and the surface of the shape being extruded is covered with this mixed gas. In addition,
Argon and helium are common inert gases.
その２は、第１の方法において不活性ガスのみ
を供給する方法である。現在工業的に得られる不
活性ガスの純度はほぼ99.99％であり、微量の酸
素が不純物として必ず含まれている。 The second method is to supply only an inert gas in the first method. The purity of inert gas currently available industrially is approximately 99.99%, and it always contains trace amounts of oxygen as an impurity.
上記のいずれの方法においても、押出成形時
に、形材の外表面が高温でかつ水分を含んだ大気
と直接接触することが防がれるので、外表面に水
和酸化膜が生成されることはない。そして、第１
の方法ではスリーブ内に酸素が存在し、第２の方
法でも不純物としての酸素が存在するので、活性
なアルミニウム外表面にちみつで薄い酸化膜が生
成する。第１の方法では、酸化膜の厚さは20〜30
Å程度のものが得られるが、第２の方法では当然
のことながらこれよりも膜厚はかなり薄くなる。
したがつて、押出成形後、形材が大気中に長期間
放置されるような場合には、大気環境下で平衡状
態になるまで酸化膜が成長するために、ちみつな
酸化膜にさらに一部粗な水和酸化膜が生成して両
者が共存する状態となり、真空性能が若干劣化す
ることもある。このような場合には、第１の方法
が好ましい。 In any of the above methods, the outer surface of the profile is prevented from coming into direct contact with the high temperature and moisture-containing atmosphere during extrusion molding, so the formation of a hydrated oxide film on the outer surface is prevented. do not have. And the first
In the first method, oxygen is present in the sleeve, and in the second method, oxygen is also present as an impurity, so a thin oxide film of honey is formed on the active aluminum outer surface. In the first method, the thickness of the oxide film is 20-30
Although a film thickness of approximately 1.5 Å can be obtained, the film thickness in the second method is naturally much thinner than this.
Therefore, if the shaped material is left in the atmosphere for a long time after extrusion, the oxide film will grow until it reaches an equilibrium state in the atmospheric environment, so that some of the honey oxide film will be A rough hydrated oxide film may be formed and both may coexist, resulting in a slight deterioration of vacuum performance. In such cases, the first method is preferred.
なお、この発明の方法によつて得られた押出形
材は、イオンポンプ用電極板に限らず、真空を保
つ必要のあるその他の機器に用いることができ
る。 Note that the extruded shape obtained by the method of the present invention can be used not only for electrode plates for ion pumps but also for other devices that require maintaining a vacuum.
実施例
この発明の実施例を、以下図面を参照して説明
する。Embodiments Examples of the present invention will be described below with reference to the drawings.
第１図に示す押出プレスにおいて、１はコンテ
ナ、２はコンテナ１内のアルミニウム・ビレツ
ト、３，４はビレツト２を押圧するダミー・ブロ
ツクおよびステム、５はダイス、６はバツカー
で、これの内周面にダイス５の押出口と連通する
スリーブ７が装着せられている。スリーブ７の内
径は100mm、長さは1500mmである。８はダイス・
ホルダ、９はボルスタで、スリーブ７はこれより
前方に長く突出している。１０はセミボルスタ、
１１はセミボルスタ１０の内部においてスリーブ
７の周壁にあけられた混合ガス供給口、１２は混
合ガス容器で、これに取付けられた導管１３が混
合ガス供給口１１に導かれている。１４はこの押
出プレスにより押出し成形途上の形材であり、こ
れは厚さ２mm、巾30mmのフラツト・バーである。 In the extrusion press shown in Fig. 1, 1 is a container, 2 is an aluminum billet in the container 1, 3 and 4 are dummy blocks and stems that press the billet 2, 5 is a die, and 6 is a backer. A sleeve 7 communicating with the extrusion port of the die 5 is attached to the circumferential surface. The sleeve 7 has an inner diameter of 100 mm and a length of 1500 mm. 8 is a dice
The holder 9 is a bolster, from which the sleeve 7 projects long forward. 10 is semi-bolster,
11 is a mixed gas supply port opened in the peripheral wall of the sleeve 7 inside the semi-bolster 10, 12 is a mixed gas container, and a conduit 13 attached to this container is guided to the mixed gas supply port 11. Reference numeral 14 designates a shape member that is being extruded by this extrusion press, and is a flat bar with a thickness of 2 mm and a width of 30 mm.
つぎに押出形材の製造順序について述べる。 Next, the manufacturing order of extruded shapes will be described.
まず、ダイス５を苛性洗浄した後、560℃で３
時間均質化処理したA6063のビレツト２を押出温
度500℃、押出速度10m／minで押出す。このさ
い潤滑油は使用しない。前記押出の直前に混合ガ
ス容器１２より酸素７容量％、残部アルゴンより
なる混合ガス１５を導管１３を経て混合ガス供給
口１１より圧力２〜３Kg／cm2で噴出し、スリーブ
７内に供給する。成形途上のまだ高温の形材１４
は、スリーブ７内の混合ガスの雰囲気１５中にあ
り、その結果大気と接触しない状態に保たれる。
押出成形後の形材１４を250℃まで強制空冷し、
続いて自然冷却した後引張り矯正する。つぎに同
様そのままの状態で180℃で６時間時効処理を行
なう。 First, after caustic cleaning the dice 5,
Billet 2 of A6063 subjected to time homogenization treatment is extruded at an extrusion temperature of 500°C and an extrusion speed of 10 m/min. Do not use lubricant at this time. Immediately before the extrusion, a mixed gas 15 consisting of 7% by volume oxygen and the balance argon is ejected from the mixed gas container 12 through the conduit 13 from the mixed gas supply port 11 at a pressure of 2 to 3 kg/cm 2 and supplied into the sleeve 7. . Shape 14 still in the process of being formed and still hot
is in a mixed gas atmosphere 15 within the sleeve 7 and is thus kept out of contact with the atmosphere.
After extrusion molding, the shaped material 14 is forcedly air-cooled to 250°C,
Next, it is naturally cooled and then stretched and straightened. Next, aging treatment is performed at 180° C. for 6 hours in the same state.
上記押出形材の外表面にちみつでかつ薄い酸化
膜が形成されており、これを150℃で24時間脱ガ
ス処理し、真空度を測定したところ、10-13Torr.
l／s.cm2以下の放出ガス係数が得られた。これは、
従来では全く予期し得ない現象によるものであ
る。すなわち、表面の酸化膜が、形材内部の残留
ガスを吸着する真空ポンプの作用をする特性に基
くものである。 A thin honey oxide film was formed on the outer surface of the extruded shape, and when this was degassed at 150°C for 24 hours and the degree of vacuum was measured, it was found to be 10 -13 Torr.
Outgassing coefficients of less than l/s.cm 2 were obtained. this is,
This is due to a phenomenon that could not have been predicted in the past. That is, this is based on the property that the oxide film on the surface acts as a vacuum pump that adsorbs residual gas inside the shape.
発明の効果
従来方法で製造されたアルミニウム押出形材を
用いた場合、真空を保持すべき空間の真空度が低
下する理由は、アルミニウム外表面に水和酸化膜
が形成せられており、この水和酸化膜に吸蔵され
た状態になつている真空度低下物質が該空間に放
出されるからであるが、この発明の真空用アルミ
ニウム製中空押出形材の製造法によれば、アルミ
ニウム形材を押出成形するにあたり、押出時の形
材が大気と接触しないような雰囲気を形成し、該
雰囲気中へ形材を押出するものであるから、形材
の外表面に問題のある水和酸化膜が生成しない。Effects of the invention When using extruded aluminum shapes produced by conventional methods, the reason why the degree of vacuum in the space where vacuum should be maintained decreases is that a hydrated oxide film is formed on the outer surface of the aluminum, and this water This is because the vacuum-degrading substances that are occluded in the Japanese oxide film are released into the space.According to the method for manufacturing a hollow extruded aluminum profile for vacuum use of the present invention, the aluminum profile is During extrusion molding, an atmosphere is created in which the shape during extrusion does not come into contact with the atmosphere, and the shape is extruded into this atmosphere, so there is no possibility that a problematic hydrated oxide film will form on the outer surface of the shape. Not generated.
他方該雰囲気中に含まれている酸素により、形
材の外表面に酸化膜が形成せられる。この酸化膜
の膜質はちみつであるから、水和酸化膜に較べて
真空度低下物質の吸着、吸蔵は著しく少なく、か
つ吸着、吸蔵されていても脱ガス処理により簡単
にこれを除去することができる。したがつて、真
空度低下物質が放出される量が非常に少なくな
り、高真空度を保つことができる。 On the other hand, due to the oxygen contained in the atmosphere, an oxide film is formed on the outer surface of the profile. Because the film quality of this oxide film is honey, there is significantly less adsorption and occlusion of vacuum deteriorating substances compared to a hydrated oxide film, and even if adsorption or occlusion occurs, it can be easily removed by degassing treatment. . Therefore, the amount of vacuum-lowering substances released is extremely small, and a high vacuum can be maintained.
図面はこの発明の実施例を示す押出成形途上に
おける押出プレスの縦断面図である。
１４……形材、１５……押出時の形材が大気と
接触しないような雰囲気。
The drawing is a longitudinal sectional view of an extrusion press in the middle of extrusion molding, showing an embodiment of the present invention. 14...shape, 15...atmosphere such that the shape during extrusion does not come into contact with the atmosphere.
Claims (1)
押出時の形材が大気と接触しないような雰囲気を
形成し、該雰囲気中へ形材を押出し、該雰囲気中
に含まれている酸素により形材の外表面にちみつ
な酸化皮膜を形成することを特徴とする真空用ア
ルミニウム押出形材の製造法。1 When extruding aluminum shapes,
Creating an atmosphere in which the shape during extrusion does not come into contact with the atmosphere, extruding the shape into this atmosphere, and forming a honey oxide film on the outer surface of the shape due to the oxygen contained in the atmosphere. A method for manufacturing aluminum extruded shapes for vacuum use, characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23441982A JPS59125212A (en) | 1982-12-29 | 1982-12-29 | Manufacture of extruded aluminum shape material for vacuum use |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23441982A JPS59125212A (en) | 1982-12-29 | 1982-12-29 | Manufacture of extruded aluminum shape material for vacuum use |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59125212A JPS59125212A (en) | 1984-07-19 |
| JPS631135B2 true JPS631135B2 (en) | 1988-01-11 |
Family
ID=16970716
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23441982A Granted JPS59125212A (en) | 1982-12-29 | 1982-12-29 | Manufacture of extruded aluminum shape material for vacuum use |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59125212A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB9326050D0 (en) * | 1993-12-21 | 1994-02-23 | Holton Machinery Ltd | Continuous extrusion |
| DE10118441A1 (en) * | 2001-04-12 | 2002-10-17 | Linde Ag | Inerting during extrusion |
-
1982
- 1982-12-29 JP JP23441982A patent/JPS59125212A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59125212A (en) | 1984-07-19 |
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