JPS63112356U - - Google Patents
Info
- Publication number
- JPS63112356U JPS63112356U JP1987004183U JP418387U JPS63112356U JP S63112356 U JPS63112356 U JP S63112356U JP 1987004183 U JP1987004183 U JP 1987004183U JP 418387 U JP418387 U JP 418387U JP S63112356 U JPS63112356 U JP S63112356U
- Authority
- JP
- Japan
- Prior art keywords
- sectional
- view
- memory cell
- capacitor
- trench
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Landscapes
- Static Random-Access Memory (AREA)
- Semiconductor Integrated Circuits (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987004183U JPS63112356U (OSRAM) | 1987-01-14 | 1987-01-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987004183U JPS63112356U (OSRAM) | 1987-01-14 | 1987-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63112356U true JPS63112356U (OSRAM) | 1988-07-19 |
Family
ID=30784620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987004183U Pending JPS63112356U (OSRAM) | 1987-01-14 | 1987-01-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63112356U (OSRAM) |
-
1987
- 1987-01-14 JP JP1987004183U patent/JPS63112356U/ja active Pending
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