JPS63112335U - - Google Patents
Info
- Publication number
- JPS63112335U JPS63112335U JP242487U JP242487U JPS63112335U JP S63112335 U JPS63112335 U JP S63112335U JP 242487 U JP242487 U JP 242487U JP 242487 U JP242487 U JP 242487U JP S63112335 U JPS63112335 U JP S63112335U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor substrate
- etched
- light source
- source means
- infrared
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims 2
- 238000012544 monitoring process Methods 0.000 claims 1
- 230000003595 spectral effect Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP242487U JPS63112335U (enExample) | 1987-01-13 | 1987-01-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP242487U JPS63112335U (enExample) | 1987-01-13 | 1987-01-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63112335U true JPS63112335U (enExample) | 1988-07-19 |
Family
ID=30781252
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP242487U Pending JPS63112335U (enExample) | 1987-01-13 | 1987-01-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63112335U (enExample) |
-
1987
- 1987-01-13 JP JP242487U patent/JPS63112335U/ja active Pending