JPS63110570U - - Google Patents
Info
- Publication number
- JPS63110570U JPS63110570U JP128787U JP128787U JPS63110570U JP S63110570 U JPS63110570 U JP S63110570U JP 128787 U JP128787 U JP 128787U JP 128787 U JP128787 U JP 128787U JP S63110570 U JPS63110570 U JP S63110570U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- conductor layer
- sample
- capacitance
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 230000002123 temporal effect Effects 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP128787U JPH0627653Y2 (ja) | 1987-01-07 | 1987-01-07 | エツチング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP128787U JPH0627653Y2 (ja) | 1987-01-07 | 1987-01-07 | エツチング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63110570U true JPS63110570U (enExample) | 1988-07-15 |
| JPH0627653Y2 JPH0627653Y2 (ja) | 1994-07-27 |
Family
ID=30779055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP128787U Expired - Lifetime JPH0627653Y2 (ja) | 1987-01-07 | 1987-01-07 | エツチング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0627653Y2 (enExample) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013014771A1 (ja) | 2011-07-27 | 2013-01-31 | トヨタ自動車 株式会社 | 車両の消音装置 |
-
1987
- 1987-01-07 JP JP128787U patent/JPH0627653Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0627653Y2 (ja) | 1994-07-27 |