JPS63110394U - - Google Patents
Info
- Publication number
- JPS63110394U JPS63110394U JP229687U JP229687U JPS63110394U JP S63110394 U JPS63110394 U JP S63110394U JP 229687 U JP229687 U JP 229687U JP 229687 U JP229687 U JP 229687U JP S63110394 U JPS63110394 U JP S63110394U
- Authority
- JP
- Japan
- Prior art keywords
- suction pad
- conveying device
- moving
- moving means
- suctions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Specific Conveyance Elements (AREA)
- De-Stacking Of Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP229687U JPS63110394U (fr) | 1987-01-09 | 1987-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP229687U JPS63110394U (fr) | 1987-01-09 | 1987-01-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110394U true JPS63110394U (fr) | 1988-07-15 |
Family
ID=30781007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP229687U Pending JPS63110394U (fr) | 1987-01-09 | 1987-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110394U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04340245A (ja) * | 1991-03-23 | 1992-11-26 | Tokyo Electron Ltd | ウエハ移送装置 |
-
1987
- 1987-01-09 JP JP229687U patent/JPS63110394U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04340245A (ja) * | 1991-03-23 | 1992-11-26 | Tokyo Electron Ltd | ウエハ移送装置 |