JPS63110394U - - Google Patents
Info
- Publication number
- JPS63110394U JPS63110394U JP229687U JP229687U JPS63110394U JP S63110394 U JPS63110394 U JP S63110394U JP 229687 U JP229687 U JP 229687U JP 229687 U JP229687 U JP 229687U JP S63110394 U JPS63110394 U JP S63110394U
- Authority
- JP
- Japan
- Prior art keywords
- suction pad
- conveying device
- moving
- moving means
- suctions
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- De-Stacking Of Articles (AREA)
- Specific Conveyance Elements (AREA)
Description
第１図はこの考案の一実施例の全体構成図、第
２図はその吸着パツド部分の側面図である。
１……吸着パツド、２……被運搬物、３……移
動手段、５……制御手段。
FIG. 1 is an overall configuration diagram of an embodiment of this invention, and FIG. 2 is a side view of the suction pad portion thereof. 1... Suction pad, 2... Transported object, 3... Moving means, 5... Control means.
Claims (1)
ドと、この吸着パツドを持上げて移動させる移動
手段とを備えた運搬装置において、前記吸着パツ
ドを前記被運搬物の未運搬の適正配置位置の端部
に位置させ、前記吸着パツドの内圧を検知して前
記移動手段を不能動化させる制御手段を設けた運
搬装置。 In a conveying device equipped with a suction pad that suctions an object by applying negative pressure inside the suction pad, and a moving means for lifting and moving the suction pad, the suction pad is moved to a proper position where the object is not yet being transported. A conveying device comprising: a control means located at an end portion of the suction pad for detecting the internal pressure of the suction pad and disabling the moving means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP229687U JPS63110394U (en) | 1987-01-09 | 1987-01-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP229687U JPS63110394U (en) | 1987-01-09 | 1987-01-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63110394U true JPS63110394U (en) | 1988-07-15 |
Family
ID=30781007
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP229687U Pending JPS63110394U (en) | 1987-01-09 | 1987-01-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63110394U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04340245A (en) * | 1991-03-23 | 1992-11-26 | Tokyo Electron Ltd | Wafer transfer apparatus |
-
1987
- 1987-01-09 JP JP229687U patent/JPS63110394U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04340245A (en) * | 1991-03-23 | 1992-11-26 | Tokyo Electron Ltd | Wafer transfer apparatus |