JPS63110031U - - Google Patents

Info

Publication number
JPS63110031U
JPS63110031U JP165087U JP165087U JPS63110031U JP S63110031 U JPS63110031 U JP S63110031U JP 165087 U JP165087 U JP 165087U JP 165087 U JP165087 U JP 165087U JP S63110031 U JPS63110031 U JP S63110031U
Authority
JP
Japan
Prior art keywords
semiconductor material
rotor
casing
air supply
accommodates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP165087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH069497Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987001650U priority Critical patent/JPH069497Y2/ja
Publication of JPS63110031U publication Critical patent/JPS63110031U/ja
Application granted granted Critical
Publication of JPH069497Y2 publication Critical patent/JPH069497Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Solid Materials (AREA)
  • Centrifugal Separators (AREA)
JP1987001650U 1987-01-09 1987-01-09 半導体材料乾燥装置 Expired - Lifetime JPH069497Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987001650U JPH069497Y2 (ja) 1987-01-09 1987-01-09 半導体材料乾燥装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987001650U JPH069497Y2 (ja) 1987-01-09 1987-01-09 半導体材料乾燥装置

Publications (2)

Publication Number Publication Date
JPS63110031U true JPS63110031U (enrdf_load_stackoverflow) 1988-07-15
JPH069497Y2 JPH069497Y2 (ja) 1994-03-09

Family

ID=30779759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987001650U Expired - Lifetime JPH069497Y2 (ja) 1987-01-09 1987-01-09 半導体材料乾燥装置

Country Status (1)

Country Link
JP (1) JPH069497Y2 (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5846642A (ja) * 1981-09-12 1983-03-18 Mitsubishi Electric Corp ウエ−ハ洗浄乾燥装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5846642A (ja) * 1981-09-12 1983-03-18 Mitsubishi Electric Corp ウエ−ハ洗浄乾燥装置

Also Published As

Publication number Publication date
JPH069497Y2 (ja) 1994-03-09

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