JPS63108628U - - Google Patents
Info
- Publication number
- JPS63108628U JPS63108628U JP20169286U JP20169286U JPS63108628U JP S63108628 U JPS63108628 U JP S63108628U JP 20169286 U JP20169286 U JP 20169286U JP 20169286 U JP20169286 U JP 20169286U JP S63108628 U JPS63108628 U JP S63108628U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- reaction tube
- semiconductor heat
- wall
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000005192 partition Methods 0.000 claims 1
- 239000000376 reactant Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20169286U JPS63108628U (enExample) | 1986-12-27 | 1986-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20169286U JPS63108628U (enExample) | 1986-12-27 | 1986-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63108628U true JPS63108628U (enExample) | 1988-07-13 |
Family
ID=31165381
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20169286U Pending JPS63108628U (enExample) | 1986-12-27 | 1986-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63108628U (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5613720A (en) * | 1979-07-16 | 1981-02-10 | Fujitsu Ltd | Heat treating device |
-
1986
- 1986-12-27 JP JP20169286U patent/JPS63108628U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5613720A (en) * | 1979-07-16 | 1981-02-10 | Fujitsu Ltd | Heat treating device |
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